KESTERS, Els

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KESTERS, Els

els.kesters@uhasselt.be

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Author: Claes, M.

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		Issue Date	Title	Contributor(s)	Type	Cat.
	1	2008	Photoresist characterization and wet strip after low-k dry etch	Claes, M.; Le, Q. T.; Keldermans, J.; KESTERS, Els; Lux, M.; Franquet, A.; Vereecke, G.; Mertens, P.W.; Frank, M.M.; CARLEER, Robert; ADRIAENSENS, Peter; VANDERZANDE, Dirk	Proceedings Paper	C1
	2	2008	Chemical and structural modifications in a 193-nm photoresist after low-k dry etch	KESTERS, Els; Claes, M.; Le, Q.T.; Lux, M.; Franquet, A.; Vereecke, G.; Mertens, P.W.; Frank, M.M.; CARLEER, Robert; ADRIAENSENS, Peter; Biebuyk, J.J.; Bebelman, S.	Journal Contribution	A1