KESTERS, Els

Email Alert RSS Feed

Profile

Full Name
KESTERS, Els
Email
els.kesters@uhasselt.be
 
Loading... 5 0 5 0 false
Loading... 6 0 5 0 false

Publications

Refined By:
Author:  ADRIAENSENS, Peter

Results 1-4 of 4 (Search time: 0.002 seconds).

Issue DateTitleContributor(s)TypeCat.
12011Characterization of Modification of 193-nm Photoresist by HBr PlasmaVereecke, G.; CLAES, Monica; Le, Q. T.; KESTERS, Els; Struyf, H.; CARLEER, Robert; ADRIAENSENS, PeterJournal ContributionA1
22008Photoresist characterization and wet strip after low-k dry etchClaes, M.; Le, Q. T.; Keldermans, J.; KESTERS, Els; Lux, M.; Franquet, A.; Vereecke, G.; Mertens, P.W.; Frank, M.M.; CARLEER, Robert; ADRIAENSENS, Peter; VANDERZANDE, DirkProceedings PaperC1
32008Chemical and structural modifications in a 193-nm photoresist after low-k dry etchKESTERS, Els; Claes, M.; Le, Q.T.; Lux, M.; Franquet, A.; Vereecke, G.; Mertens, P.W.; Frank, M.M.; CARLEER, Robert; ADRIAENSENS, Peter; Biebuyk, J.J.; Bebelman, S.Journal ContributionA1
42002The thermal conversion reaction of sulphonyl substituted poly (para-xylylene): evidence for the formation of PPV structuresKESTERS, Els; de Kok, MM; CARLEER, Robert; CZECH, Jan; ADRIAENSENS, Peter; GELAN, Jan; VANDERZANDE, DirkJournal ContributionA1