KESTERS, Els

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KESTERS, Els
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els.kesters@uhasselt.be
 
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Internal UHasselt:  CARLEER, Robert

Results 1-5 of 5 (Search time: 0.003 seconds).

Issue DateTitleContributor(s)TypeCat.
12011Characterization of Modification of 193-nm Photoresist by HBr PlasmaVereecke, G.; CLAES, Monica; Le, Q. T.; KESTERS, Els; Struyf, H.; CARLEER, Robert; ADRIAENSENS, PeterJournal ContributionA1
22008Photoresist characterization and wet strip after low-k dry etchClaes, M.; Le, Q. T.; Keldermans, J.; KESTERS, Els; Lux, M.; Franquet, A.; Vereecke, G.; Mertens, P.W.; Frank, M.M.; CARLEER, Robert; ADRIAENSENS, Peter; VANDERZANDE, DirkProceedings PaperC1
32008Chemical and structural modifications in a 193-nm photoresist after low-k dry etchKESTERS, Els; Claes, M.; Le, Q.T.; Lux, M.; Franquet, A.; Vereecke, G.; Mertens, P.W.; Frank, M.M.; CARLEER, Robert; ADRIAENSENS, Peter; Biebuyk, J.J.; Bebelman, S.Journal ContributionA1
42005Study of the thermal elimination and degradation processes of n-alkylsulfinyl-PPV and -OC1C10-PPV precursor polymers with in situ spectroscopic techniquesKESTERS, Els; VANDERZANDE, Dirk; LUTSEN, Laurence; PENXTEN, Huguette; CARLEER, RobertJournal ContributionA1
52002The thermal conversion reaction of sulphonyl substituted poly (para-xylylene): evidence for the formation of PPV structuresKESTERS, Els; de Kok, MM; CARLEER, Robert; CZECH, Jan; ADRIAENSENS, Peter; GELAN, Jan; VANDERZANDE, DirkJournal ContributionA1