CLAES, Monica

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Full Name
CLAES, Monica
Email
monica.claes@uhasselt.be
 
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Author:  Struyf, H.

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Issue DateTitleContributor(s)TypeCat.
12013An environment friendly wet strip process for 193 nm lithography patterning in BEOL applicationsVereecke, G.; KESTERS, Els; Le, Q. T.; CLAES, Monica; Lux, M.; Struyf, H.; CARLEER, Robert; ADRIAENSENS, PeterJournal ContributionA1
22011Characterization of Modification of 193-nm Photoresist by HBr PlasmaVereecke, G.; CLAES, Monica; Le, Q. T.; KESTERS, Els; Struyf, H.; CARLEER, Robert; ADRIAENSENS, PeterJournal ContributionA1