CLAES, Monica

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CLAES, Monica
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monica.claes@uhasselt.be
 
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Internal UHasselt:  KESTERS, Els

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Issue DateTitleContributor(s)TypeCat.
12011Characterization of Modification of 193-nm Photoresist by HBr PlasmaVereecke, G.; CLAES, Monica; Le, Q. T.; KESTERS, Els; Struyf, H.; CARLEER, Robert; ADRIAENSENS, PeterJournal ContributionA1