On the development of CVD diamond film morphology due to the twinning on {111} surfaces

Abstract

CVD diamond films were grown under various conditions corresponding to various values of the growth parameter α=√3ν100/ν111. It was observed that the boundaries of the growing crystals nearly remained free of twins. Further, the experiments suggest that the overall twin abundance on a parent facet depends on α. A theoretical explanation for these facts is given using a new concept: the nucleation surface. This surface is proportional to the twin coverage probability at a given point on the parent crystal face, and it can be calculated in detail for every position on the parent facet and for every type of twin. The concept of the nucleation surface can be used to explain and predict film morphologies in cases where twinning is important during deposition.