KESTERS, Els

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Full Name
KESTERS, Els
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els.kesters@uhasselt.be
 
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Author:  CARLEER, Robert
Type:  Proceedings Paper

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Issue DateTitleContributor(s)TypeCat.
12008Photoresist characterization and wet strip after low-k dry etchClaes, M.; Le, Q. T.; Keldermans, J.; KESTERS, Els; Lux, M.; Franquet, A.; Vereecke, G.; Mertens, P.W.; Frank, M.M.; CARLEER, Robert; ADRIAENSENS, Peter; VANDERZANDE, DirkProceedings PaperC1