A method for the determination of the effective diffusion coefficient and sputtering rate during plasma diffusion treatment

Please use this identifier to cite or link to this item: http://hdl.handle.net/1942/5510

Title:	A method for the determination of the effective diffusion coefficient and sputtering rate during plasma diffusion treatment
Authors:	Dimitrov, V.I. D'HAEN, Jan KNUYT, Gilbert QUAEYHAEGENS, Carl STALS, Lambert
Issue Date:	1998
Source:	Surface and coatings technology, 99. p. 234-241
Document URI:	http://hdl.handle.net/1942/5510
DOI:	10.1016/S0257-8972(97)00530-6
Type:	Journal Contribution
Appears in Collections:	Research publications

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