VAN BAREL, Gregory

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VAN BAREL, Gregory
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gregory.vanbarel@uhasselt.be
 
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Author:  Du Bois, Bert

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Issue DateTitleContributor(s)TypeCat.
12010Apparent and steady-state etch rates in thin film etching and under-etching of microstructures: II. CharacterizationVAN BAREL, Gregory; Du Bois, Bert; Van Hoof, Rita; De Wachter, Jef; DE CEUNINCK, Ward; Witvrouw, AnnJournal ContributionA1