VAN BAREL, Gregory

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Full Name
VAN BAREL, Gregory
Email
gregory.vanbarel@uhasselt.be
 
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Publications

Results 1-4 of 4 (Search time: 0.005 seconds).

Issue DateTitleContributor(s)TypeCat.
12011In-situ characterization of mechanical properties of MEMS structural layers using different test approaches, with application to thick poly-SiGeVAN BAREL, GregoryTheses and DissertationsT1
22010Apparent and steady-state etch rates in thin film etching and under-etching of microstructures: I. ModellingVAN BAREL, Gregory; Mertens, Luc; DE CEUNINCK, Ward; Witvrouw, AnnJournal ContributionA1
32010Apparent and steady-state etch rates in thin film etching and under-etching of microstructures: II. CharacterizationVAN BAREL, Gregory; Du Bois, Bert; Van Hoof, Rita; De Wachter, Jef; DE CEUNINCK, Ward; Witvrouw, AnnJournal ContributionA1
42008The influence of geometrical imperfections in micromachined cantilevers on the extracted Young's modulus using a simple modelVAN BAREL, Gregory; DE CEUNINCK, Ward; Witvrouw, AnnJournal ContributionA1