Please use this identifier to cite or link to this item: http://hdl.handle.net/1942/11217
Full metadata record
DC FieldValueLanguage
dc.contributor.authorFendrych, Frantisek-
dc.contributor.authorTaylor, Andrew-
dc.contributor.authorPeksa, Ladislav-
dc.contributor.authorKratochvilova, Irena-
dc.contributor.authorVlcek, Jan-
dc.contributor.authorRezacova, Vladimira-
dc.contributor.authorPetrak, Vaclav-
dc.contributor.authorKluiber, Zdenek-
dc.contributor.authorFekete, Ladislav-
dc.contributor.authorLiehr, Michael-
dc.contributor.authorNESLADEK, Milos-
dc.date.accessioned2010-10-05T09:06:35Z-
dc.date.availableNO_RESTRICTION-
dc.date.available2010-10-05T09:06:35Z-
dc.date.issued2010-
dc.identifier.citationJOURNAL OF PHYSICS D-APPLIED PHYSICS, 43(37)-
dc.identifier.issn0022-3727-
dc.identifier.urihttp://hdl.handle.net/1942/11217-
dc.description.abstractIndustrial applications of plasma-enhanced chemical vapour deposition (CVD) diamond grown on large area substrates, 3D shapes, at low substrate temperatures and on standard engineering substrate materials require novel plasma concepts. Based on the pioneering work of the group at AIST in Japan, the high-density coaxial delivery type of plasmas has been explored (Tsugawa et al 2006 New Diamond Front. Carbon Technol. 16 337-46). However, an important challenge is to obtain commercially interesting growth rates at very low substrate temperatures. In this work we introduce the concept of novel linear antenna sources, designed at Leybold Optics Dresden, using high-frequency pulsed MW discharge with a high plasma density. This type of pulse discharges leads to the preparation of nanocrystalline diamond (NCD) thin films, compared with ultra-NCD thin films prepared in (Tsugawa et al 2006 New Diamond Front. Carbon Technol. 16 337-46). We present optical emission spectroscopy data for the CH4-CO2-H-2 gas chemistry and we discuss the basic properties of the NCD films grown.-
dc.description.sponsorshipThanks to Dr Masataka Hasegawa from AIST Japan for fruitful discussions. Financial support from the Academy of Sciences of the Czech Republic (grants KAN200100801, KAN300100801, KAN301370701 and KAN400480701), the European R&D projects FP7 ITN Grant No 238201 (MATCON) and COST MP0901 (NanoTP) is gratefully acknowledged.-
dc.language.isoen-
dc.publisherIOP PUBLISHING LTD-
dc.titleGrowth and characterization of nanodiamond layers prepared using the plasma-enhanced linear antennas microwave CVD system-
dc.typeJournal Contribution-
dc.identifier.issue37-
dc.identifier.volume43-
local.format.pages6-
local.bibliographicCitation.jcatA1-
dc.description.notes[Fendrych, Frantisek; Taylor, Andrew; Peksa, Ladislav; Kratochvilova, Irena; Kluiber, Zdenek; Fekete, Ladislav] Acad Sci Czech Republic, Inst Phys, VVI, CZ-18221 Prague 8, Czech Republic. [Vlcek, Jan] Prague Inst Chem Technol, Dept Phys & Measurement, CZ-16628 Prague, Czech Republic. [Rezacova, Vladimira; Petrak, Vaclav; Kluiber, Zdenek] Czech Tech Univ, Fac Biomed Engn, CZ-27201 Kladno 2, Czech Republic. [Liehr, Michael] Leybold Opt Dresden GmbH, D-01109 Dresden, Germany. [Nesladek, Milos] Univ Hasselt, IMEC, Inst Mat Res, IMOMEC Div, B-3590 Diepenbeek, Belgium. fendrych@fzu.cz-
local.type.refereedRefereed-
local.type.specifiedArticle-
dc.bibliographicCitation.oldjcatA1-
dc.identifier.doi10.1088/0022-3727/43/37/374018-
dc.identifier.isi000281544100019-
item.accessRightsClosed Access-
item.fulltextNo Fulltext-
item.validationecoom 2011-
item.contributorFendrych, Frantisek-
item.contributorTaylor, Andrew-
item.contributorPeksa, Ladislav-
item.contributorKratochvilova, Irena-
item.contributorVlcek, Jan-
item.contributorRezacova, Vladimira-
item.contributorPetrak, Vaclav-
item.contributorKluiber, Zdenek-
item.contributorFekete, Ladislav-
item.contributorLiehr, Michael-
item.contributorNESLADEK, Milos-
item.fullcitationFendrych, Frantisek; Taylor, Andrew; Peksa, Ladislav; Kratochvilova, Irena; Vlcek, Jan; Rezacova, Vladimira; Petrak, Vaclav; Kluiber, Zdenek; Fekete, Ladislav; Liehr, Michael & NESLADEK, Milos (2010) Growth and characterization of nanodiamond layers prepared using the plasma-enhanced linear antennas microwave CVD system. In: JOURNAL OF PHYSICS D-APPLIED PHYSICS, 43(37).-
crisitem.journal.issn0022-3727-
crisitem.journal.eissn1361-6463-
Appears in Collections:Research publications
Show simple item record

SCOPUSTM   
Citations

40
checked on Sep 2, 2020

WEB OF SCIENCETM
Citations

54
checked on Mar 29, 2024

Page view(s)

74
checked on Sep 7, 2022

Google ScholarTM

Check

Altmetric


Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.