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Title: | Strontium niobate high-k dielectrics: Film deposition and material properties | Authors: | HARDY, An Van Elshocht, S. Adelmann, C. Kittl, J. A. De Gendt, S. Heyns, M. D'HAEN, Jan D'Olieslaeger, A. VAN BAEL, Marlies VAN DEN RUL, Heidi MULLENS, Jules |
Issue Date: | 2010 | Publisher: | PERGAMON-ELSEVIER SCIENCE LTD | Source: | ACTA MATERIALIA, 58 (1). p. 216-225 | Abstract: | Strontium niobate ultrathin films were processed by water-based chemical solution deposition, an approach that offers environmental benefits. SrNb2O6 and SrNb2O7 show high-k values, which is important for applications such as alternative gate dielectrics. The study of ultrathin films (thickness <30 nm) is crucial, as this is the thickness range for the application envisaged, and as film properties depend strongly on the film thickness. SrNb2O6 had a lower crystallization temperature, less interfacial silicate, lower carbonate content, and higher roughness compared to SrNb2O7. The k values of amorphous films were limited for both compositions (k = 12-14). Crystallization and complete removal of organics or carbonates were accomplished by high-temperature annealing, but increased the roughness and leakage current. For SrNb2O7, interfacial silicates were formed as well. Intermediate calcination steps improved the surface smoothness and increased the k value of SrNb2O6 up to 30. (C) 2009 Acta Materialia Inc. Published by Elsevier Ltd. All rights reserved. | Notes: | [Hardy, A.; Van Bael, M. K.; Van den Rul, H.; Mullens, J.] Hassell Univ, Inorgan & Phys Chem IMO, Inst Mat Res, B-3590 Diepenbeek, Belgium. [Hardy, A.; D'Haen, J.; D'Olieslaeger, A.; Van Bael, M. K.; Van den Rul, H.] IMOMEC, IMEC Vzw Div, Diepenbeek, Belgium. [Van Elshocht, S.; Adelmann, C.; Kittl, J. A.; De Gendt, S.; Heyns, M.] IMEC vzw, Heverlee, Belgium. [De Gendt, S.; Heyns, M.] KULeuven, Heverlee, Belgium. an.hardy@uhasselt.be | Keywords: | Deposition; Sol-gel; Oxides; Thin films; Dielectric constant | Document URI: | http://hdl.handle.net/1942/11411 | ISSN: | 1359-6454 | e-ISSN: | 1873-2453 | DOI: | 10.1016/j.actamat.2009.09.006 | ISI #: | 000272405600023 | Category: | A1 | Type: | Journal Contribution | Validations: | ecoom 2010 |
Appears in Collections: | Research publications |
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