A1N on nanocrystalline diamond piezoelectric cantilevers for sensors/actuators

Abstract

Micro-cantilevers can be used as both sensors and actuators. In this work, the design, fabrication and characterization of piezoelectrically driven nano-crystalline diamond (NCD) cantilevers are reported Diamond films were grown on silicon (100) substrates by microwave plasma enhanced chemical vapor deposition (MW-PECVD). Cantilevers are coated by DC pulsed piezoelectric with AIN films that is sandwiched between two metallic electrodes. The thicknesses of AIN and diamond layers are 1 mu m and 700nm, respectively. The influence on the electromechanical response of cantilevers length was studied. The motion of the electrically driven cantilevers is performed by measuring the evolution of the electrical impedance at the resonant frequencies that varies between 10 kHz and 130 kHz for the resonant mode.