Please use this identifier to cite or link to this item: http://hdl.handle.net/1942/13596
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dc.contributor.authorKulha, Pavel-
dc.contributor.authorBabchenko, Oleg-
dc.contributor.authorKromka, Alexander-
dc.contributor.authorHusak, Miroslav-
dc.contributor.authorHAENEN, Ken-
dc.date.accessioned2012-04-27T11:52:39Z-
dc.date.available2012-04-27T11:52:39Z-
dc.date.issued2012-
dc.identifier.citationVACUUM, 86 (6), p. 689-692-
dc.identifier.issn0042-207X-
dc.identifier.urihttp://hdl.handle.net/1942/13596-
dc.description.abstractThe paper reports on design, fabrication and characterization of piezoresistive sensors based on boron doped nanocrystalline diamond (NCD) layers. The shape and position of the piezoresistive element was optimized using finite element 3D modeling. Mechanical and piezoresistive simulations were performed. The piezoresistive sensing boron doped diamond thin films were realized on SiO2/Si3N4/Si substrates by microwave plasma enhanced chemical vapor deposition (CVD) and the piezoresistive structures were formed by reactive ion etching. The extensive study of sensor parameters e.g. deformation sensitivity, edge and contact resistances, temperature dependences gauge factor, temperature coefficient of resistance and bridge output voltage was performed. The highest gauge factor at higher temperatures (GF = 7.2 at 250 degrees C) was observed for moderate doping level (boron to carbon ratio of 3000 ppm). One of the aims was the extraction of piezoresistive coefficients of fabricated diamond layers for utilization in a finite element piezoresistive solver. (C) 2011 Elsevier Ltd. All rights reserved.-
dc.description.sponsorshipThis research has been supported by the Czech Science Foundation project No. 102/09/1601 “Micro- and nano-sensor structures and systems with embedded intelligence” and partially by the research program No. MSM6840770015 "Research of Methods and Systems for Measurement of Physical Quantities and Measured Data Processing" of the CTU in Prague. At the Institute of Physics, this work was supported by the grants IAAX00100902, KAN400100701 and by the Fellowship J.E. Purkyne. In Belgium, financial support was provided by the Research Programs G.0068.07 and G.0555.10N of the Research Foundation e Flanders (FWO), the Methusalem “NANO” network, and the IAP-P6/ 42 project ‘Quantum Effects in Clusters and Nanowires’.-
dc.language.isoen-
dc.publisherPERGAMON-ELSEVIER SCIENCE LTD-
dc.rights2011 Elsevier Ltd. All rights reserved.-
dc.subject.otherPiezoresistive coefficients-
dc.subject.otherPiezoresistivity-
dc.subject.otherNanocrystalline diamond-
dc.subject.otherFEM-
dc.titleDesign and fabrication of piezoresistive strain gauges based on nanocrystalline diamond layers-
dc.typeJournal Contribution-
dc.identifier.epage692-
dc.identifier.issue6-
dc.identifier.spage689-
dc.identifier.volume86-
local.format.pages4-
local.bibliographicCitation.jcatA1-
dc.description.notes[Kulha, Pavel; Husak, Miroslav] Czech Tech Univ, Prague 16627, Czech Republic. [Babchenko, Oleg; Kromka, Alexander] Inst Phys ASCR, Prague, Czech Republic. [Babchenko, Oleg; Kromka, Alexander] Hasselt Univ, Inst Mat Res IMO, B-3590 Diepenbeek, Belgium. [Haenen, Ken] Hasselt Univ, Div IMOMEC, IMEC Vzw, B-3590 Diepenbeek, Belgium.-
local.publisher.placeOXFORD-
local.type.refereedRefereed-
local.type.specifiedArticle-
dc.bibliographicCitation.oldjcatA1-
dc.identifier.doi10.1016/j.vacuum.2011.07.022-
dc.identifier.isi000301018400025-
dc.identifier.eissn1879-2715-
local.uhasselt.internationalyes-
item.fulltextWith Fulltext-
item.fullcitationKulha, Pavel; Babchenko, Oleg; Kromka, Alexander; Husak, Miroslav & HAENEN, Ken (2012) Design and fabrication of piezoresistive strain gauges based on nanocrystalline diamond layers. In: VACUUM, 86 (6), p. 689-692.-
item.contributorKulha, Pavel-
item.contributorBabchenko, Oleg-
item.contributorKromka, Alexander-
item.contributorHusak, Miroslav-
item.contributorHAENEN, Ken-
item.validationecoom 2013-
item.accessRightsRestricted Access-
crisitem.journal.issn0042-207X-
crisitem.journal.eissn1879-2715-
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