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http://hdl.handle.net/1942/13791
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DC Field | Value | Language |
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dc.contributor.author | DEWULF, Daan | - |
dc.contributor.author | HARDY, An | - |
dc.contributor.author | Van Elshocht, S. | - |
dc.contributor.author | DE DOBBELAERE, Christopher | - |
dc.contributor.author | Wang, W. C. | - |
dc.contributor.author | Badylevich, M. | - |
dc.contributor.author | Afanas'ev, V. V. | - |
dc.contributor.author | De Gendt, S. | - |
dc.contributor.author | VAN BAEL, Marlies | - |
dc.date.accessioned | 2012-07-16T12:14:14Z | - |
dc.date.available | 2012-07-16T12:14:14Z | - |
dc.date.issued | 2012 | - |
dc.identifier.citation | JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 159 (6), p. G75-G79 | - |
dc.identifier.issn | 0013-4651 | - |
dc.identifier.uri | http://hdl.handle.net/1942/13791 | - |
dc.description.abstract | In this work, compositional series of Gd-Nb-oxides and Gd-Ta-oxides are investigated as new potential high-k materials. Ultrathin oxide films in the range of 5-25 nm are deposited by spincoating. XRD and AFM show that the films are amorphous and smooth (RMS < 1 nm). Dielectric constants are derived from capacitance voltage (CV) measurements and EOT extraction. K values of the Gd-Nb-Ox series range from 13-16 while higher k values are obtained for the Gd-Ta-Ox series ranging from 15-19. For the Gd-Nb-Ox series, a higher k value is obtained for the most Gd-rich composition, while the opposite trend for the Gd-Ta-Ox series is noticed. Furthermore, the Gd-Ta-Ox shows the lowest leakages, as concluded from current-voltage (IV) measurements. A higher Gd content leads to decreased leakage, concurrent with increased band gaps. | - |
dc.language.iso | en | - |
dc.publisher | ELECTROCHEMICAL SOC INC | - |
dc.subject.other | Electrochemistry; Materials Science, Coatings & Films | - |
dc.title | Gadolinium -niobates and -tantalates: Amorphous High-k Materials by Aqueous CSD | - |
dc.type | Journal Contribution | - |
dc.identifier.epage | G79 | - |
dc.identifier.issue | 6 | - |
dc.identifier.spage | G75 | - |
dc.identifier.volume | 159 | - |
local.format.pages | 5 | - |
local.bibliographicCitation.jcat | A1 | - |
dc.description.notes | [Dewulf, D.; Hardy, A.; De Dobbelaere, C.; Van Bael, M. K.] Hasselt Univ, Inorgan & Phys Chem IMO, B-3590 Diepenbeek, Belgium. [Dewulf, D.; Hardy, A.; Van Bael, M. K.] IMEC VZW, Div IMOMEC, B-3590 Diepenbeek, Belgium. [Van Elshocht, S.; De Gendt, S.] IMEC VZW, B-3001 Heverlee, Belgium. [Wang, W. C.; Badylevich, M.; Afanas'ev, V. V.] Univ Leuven, Semicond Phys Lab, Dept Phys & Astron, B-3001 Heverlee, Belgium. [De Gendt, S.] KULeuven, Dept Chem, B-3001 Heverlee, Belgium. | - |
local.publisher.place | PENNINGTON | - |
local.type.refereed | Refereed | - |
local.type.specified | Article | - |
dc.bibliographicCitation.oldjcat | A1 | - |
dc.identifier.doi | 10.1149/2.072206jes | - |
dc.identifier.isi | 000304140700067 | - |
item.accessRights | Closed Access | - |
item.contributor | DEWULF, Daan | - |
item.contributor | HARDY, An | - |
item.contributor | Van Elshocht, S. | - |
item.contributor | DE DOBBELAERE, Christopher | - |
item.contributor | Wang, W. C. | - |
item.contributor | Badylevich, M. | - |
item.contributor | Afanas'ev, V. V. | - |
item.contributor | De Gendt, S. | - |
item.contributor | VAN BAEL, Marlies | - |
item.fulltext | No Fulltext | - |
item.fullcitation | DEWULF, Daan; HARDY, An; Van Elshocht, S.; DE DOBBELAERE, Christopher; Wang, W. C.; Badylevich, M.; Afanas'ev, V. V.; De Gendt, S. & VAN BAEL, Marlies (2012) Gadolinium -niobates and -tantalates: Amorphous High-k Materials by Aqueous CSD. In: JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 159 (6), p. G75-G79. | - |
item.validation | ecoom 2013 | - |
crisitem.journal.issn | 0013-4651 | - |
crisitem.journal.eissn | 1945-7111 | - |
Appears in Collections: | Research publications |
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