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Title: | Optical phonon lifetimes in sputtered AlN thin films | Authors: | POBEDINSKAS, Paulius RUTTENS, Bart D'HAEN, Jan HAENEN, Ken |
Issue Date: | 2012 | Publisher: | AMER INST PHYSICS | Source: | APPLIED PHYSICS LETTERS, 100 (19), p. Article 191906 | Abstract: | We study the vibrational properties of AlN thin films deposited on silicon (100) substrates by the reactive DC-pulsed magnetron sputtering. The frequencies and lifetimes of the E-1(TO) and A(1)(LO) optical phonons are calculated from Fourier transform infrared spectra using the factorized model of a damped oscillator. We analyze the structural properties by the x-ray diffraction technique to correlate the elongation of phonon lifetimes with increasing film thickness. The lifetimes of the phonon modes in AlN thin films are compared to the values in a single crystal. (C) 2012 American Institute of Physics. [http://dx.doi.org/10.1063/1.4711773] | Notes: | [Pobedinskas, P.; Ruttens, B.; D'Haen, J.; Haenen, K.] Hasselt Univ, Inst Mat Res IMO, B-3590 Diepenbeek, Belgium. [Ruttens, B.; D'Haen, J.; Haenen, K.] IMEC VZW, IMOMEC, B-3590 Diepenbeek, Belgium. | Keywords: | Applied Physics | Document URI: | http://hdl.handle.net/1942/13829 | ISSN: | 0003-6951 | e-ISSN: | 1077-3118 | DOI: | 10.1063/1.4711773 | ISI #: | 000304108000026 | Category: | A1 | Type: | Journal Contribution | Validations: | ecoom 2013 |
Appears in Collections: | Research publications |
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