Please use this identifier to cite or link to this item:
http://hdl.handle.net/1942/13829
Title: | Optical phonon lifetimes in sputtered AlN thin films | Authors: | POBEDINSKAS, Paulius RUTTENS, Bart D'HAEN, Jan HAENEN, Ken |
Issue Date: | 2012 | Publisher: | AMER INST PHYSICS | Source: | APPLIED PHYSICS LETTERS, 100 (19), p. Article 191906 | Abstract: | We study the vibrational properties of AlN thin films deposited on silicon (100) substrates by the reactive DC-pulsed magnetron sputtering. The frequencies and lifetimes of the E-1(TO) and A(1)(LO) optical phonons are calculated from Fourier transform infrared spectra using the factorized model of a damped oscillator. We analyze the structural properties by the x-ray diffraction technique to correlate the elongation of phonon lifetimes with increasing film thickness. The lifetimes of the phonon modes in AlN thin films are compared to the values in a single crystal. (C) 2012 American Institute of Physics. [http://dx.doi.org/10.1063/1.4711773] | Notes: | [Pobedinskas, P.; Ruttens, B.; D'Haen, J.; Haenen, K.] Hasselt Univ, Inst Mat Res IMO, B-3590 Diepenbeek, Belgium. [Ruttens, B.; D'Haen, J.; Haenen, K.] IMEC VZW, IMOMEC, B-3590 Diepenbeek, Belgium. | Keywords: | Applied Physics | Document URI: | http://hdl.handle.net/1942/13829 | ISSN: | 0003-6951 | e-ISSN: | 1077-3118 | DOI: | 10.1063/1.4711773 | ISI #: | 000304108000026 | Category: | A1 | Type: | Journal Contribution | Validations: | ecoom 2013 |
Appears in Collections: | Research publications |
Show full item record
SCOPUSTM
Citations
11
checked on Sep 3, 2020
WEB OF SCIENCETM
Citations
14
checked on Oct 12, 2024
Page view(s)
68
checked on Apr 17, 2023
Google ScholarTM
Check
Altmetric
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.