Optical phonon lifetimes in sputtered AlN thin films

Please use this identifier to cite or link to this item: http://hdl.handle.net/1942/13829

Title:	Optical phonon lifetimes in sputtered AlN thin films
Authors:	POBEDINSKAS, Paulius RUTTENS, Bart D'HAEN, Jan HAENEN, Ken
Issue Date:	2012
Publisher:	AMER INST PHYSICS
Source:	APPLIED PHYSICS LETTERS, 100 (19), p. Article 191906
Abstract:	We study the vibrational properties of AlN thin films deposited on silicon (100) substrates by the reactive DC-pulsed magnetron sputtering. The frequencies and lifetimes of the E-1(TO) and A(1)(LO) optical phonons are calculated from Fourier transform infrared spectra using the factorized model of a damped oscillator. We analyze the structural properties by the x-ray diffraction technique to correlate the elongation of phonon lifetimes with increasing film thickness. The lifetimes of the phonon modes in AlN thin films are compared to the values in a single crystal. (C) 2012 American Institute of Physics. [http://dx.doi.org/10.1063/1.4711773]
Notes:	[Pobedinskas, P.; Ruttens, B.; D'Haen, J.; Haenen, K.] Hasselt Univ, Inst Mat Res IMO, B-3590 Diepenbeek, Belgium. [Ruttens, B.; D'Haen, J.; Haenen, K.] IMEC VZW, IMOMEC, B-3590 Diepenbeek, Belgium.
Keywords:	Applied Physics
Document URI:	http://hdl.handle.net/1942/13829
ISSN:	0003-6951
e-ISSN:	1077-3118
DOI:	10.1063/1.4711773
ISI #:	000304108000026
Category:	A1
Type:	Journal Contribution
Validations:	ecoom 2013
Appears in Collections:	Research publications

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