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Title: | Grain size tuning of nanocrystalline chemical vapor deposited diamond by continuous electrical bias growth: Experimental and theoretical study | Authors: | MORTET, Vincent Zhang, Liang Eckert, Maxie D'HAEN, Jan Soltani, Ali Moreau, Myriam Troadec, David Neyts, Erik De Jaeger, Jean-Claude Verbeeck, Jo Bogaerts, Annemie Van Tendeloo, Gustaaf HAENEN, Ken WAGNER, Patrick |
Issue Date: | 2012 | Publisher: | WILEY-V C H VERLAG GMBH | Source: | PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE, 209 (9), p. 1675-1682 | Abstract: | In this work, a detailed structural and spectroscopic study of nanocrystalline diamond (NCD) thin films grown by a continuous bias assisted CVD growth technique is reported. This technique allows the tuning of grain size and phase purity in the deposited material. The crystalline properties of the films are characterized by SEM, TEM, EELS, and Raman spectroscopy. A clear improvement of the crystalline structure of the nanograined diamond film is observed for low negative bias voltages, while high bias voltages lead to thin films consisting of diamond grains of only 10 nm nanometer in size, showing remarkable similarities with so-called ultrananocrystalline diamond. These layers arecharacterized by an increasing amount of sp2-bonded carbon content of the matrix in which the diamond grains are embedded. Classical molecular dynamics simulations support the observed experimental data, giving insight in the underlying mechanism for the observed increase in deposition rate with bias voltage. Furthermore, a high atomic concentration of hydrogen has been determined in these films. Finally, Raman scattering analyses confirm that the Raman line observed at 1150 cm-1 cannot be attributed to trans-poly-acetylene, which continues to be reported in literature, reassigning it to a deformation mode of CHx bonds in NCD. | Notes: | [Mortet, Vincent; D'Haen, Jan; Haenen, Ken; Wagner, Patrick] Hasselt Univ, Inst Mat Res IMO, B-3590 Diepenbeek, Belgium. [Mortet, Vincent; D'Haen, Jan; Haenen, Ken; Wagner, Patrick] IMEC VZW, IMOMEC, B-3590 Diepenbeek, Belgium. [Mortet, Vincent] Univ Toulouse, CNRS, LAAS, F-31077 Toulouse, France. [Zhang, Liang; Verbeeck, Jo; Van Tendeloo, Gustaaf] Univ Antwerp, Electron Microscopy Mat Sci EMAT, B-2020 Antwerp, Belgium. [Eckert, Maxie; Neyts, Erik; Bogaerts, Annemie] Univ Antwerp, Dept Chem, Res Grp PLASMANT, B-2610 Antwerp, Belgium. [Soltani, Ali; Troadec, David; De Jaeger, Jean-Claude] CNRS, UMR 8520, Inst Elect Microelect & Nanotechnol, F-59652 Villeneuve Dascq, France. [Moreau, Myriam] Univ Sci & Technol Lille, Lab Spectrochim Infrarouge & Raman, F-59655 Villeneuve Dascq, France. ken.haenen@uhasselt.be | Keywords: | bias; chemical vapor deposition; molecular dynamics; nanodiamond; Raman spectroscopy; transmission electron microscopy;Materials Science, Multidisciplinary; Physics, Applied; Physics, Condensed Matter; bias; chemical vapor deposition; molecular dynamics; nanodiamond; Raman spectroscopy; transmission electron microscopy | Document URI: | http://hdl.handle.net/1942/14314 | ISSN: | 1862-6300 | e-ISSN: | 1862-6319 | DOI: | 10.1002/pssa.201200581 | ISI #: | 000308942100009 | Category: | A1 | Type: | Journal Contribution | Validations: | ecoom 2013 |
Appears in Collections: | Research publications |
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