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Title: Solution derived ZnO:Al films with low resistivity
Authors: SCHELLENS, Kevin 
Capon, B.
DE DOBBELAERE, Christopher 
Detavernier, C.
VAN BAEL, Marlies 
Issue Date: 2012
Source: THIN SOLID FILMS, 524, p. 81-85
Abstract: ZnO:Al thin films were prepared via chemical solution deposition, using 2-butoxyethanol as an alternative for 2-methoxyethanol, which is more commonly used, but acutely toxic. The precursor solutions can be readily spin coated. The phase, morphology, electrical and optical properties of the deposited films are investigated, by XRD (X-ray diffraction), scanning electron microscopy, a two-point contact measurement and UV-vis spectrophotometry respectively. This way, the effect of this solvent is investigated. The films are deposited on borosilicate glass substrates and were found to be continuous and smooth. XRD measurements show a highly preferential c-axis orientation. The effects of the thermal treatment profile and Al dopant concentration are studied with respect to the obtained electrical properties. Optimally, the electrical resistivity was lowered to 6.5x10(-3)Omega cm after annealing at 450 degrees C in a 95% He/5% H-2 atmosphere.
Notes: Van Bael, MK (reprint author), [Schellens, K.; De Dobbelaere, C.; Hardy, A.; Van Bael, M. K.] Hasselt Univ, Inst Mat Res Inorgan & Phys Chem, B-3590 Diepenbeek, Belgium. [Capon, B.; Detavernier, C.] Univ Ghent, Dept Solid State Sci, B-9000 Ghent, Belgium. [Hardy, A.; Van Bael, M. K.] IMEC Vzw, Inst Mat Res, Div IMOMEC, B-3590 Diepenbeek, Belgium. [Capon, B.; Detavernier, C.; Hardy, A.; Van Bael, M. K.] IMEC, B-3001 Louvain, Belgium. [Capon, B.; Detavernier, C.; Hardy, A.; Van Bael, M. K.] SIM Program SoPPoM, B-3001 Louvain, Belgium.
Keywords: Transparent conductive oxide; ZnO:Al; Thin film; Low resistivity; c-Axis orientation;Materials Science, Multidisciplinary; Materials Science, Coatings & Films; Physics, Applied; Physics, Condensed Matter; transparent conductive oxide; ZnO:Al; thin film; low resistivity; c-Axis orientation
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ISSN: 0040-6090
e-ISSN: 1879-2731
DOI: 10.1016/j.tsf.2012.09.059
ISI #: 000311410300013
Category: A1
Type: Journal Contribution
Validations: ecoom 2013
Appears in Collections:Research publications

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