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http://hdl.handle.net/1942/15419
Title: | Multi-sensor chip for the investigation of different types of metal oxides for the detection of H2O2 in the ppm range | Authors: | REISERT, Steffen Schneider, Benno Geissler, Hanno VAN GOMPEL, Matthias WAGNER, Patrick Schoening, Michael J. |
Issue Date: | 2013 | Publisher: | WILEY-V C H VERLAG GMBH | Source: | PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE, 210 (5), p. 898-904 | Abstract: | In this work, a multi-sensor chip for the investigation of the sensing properties of different types of metal oxides towards hydrogen peroxide in the ppm range is presented. The fabrication process and physical characterization of the multi-sensor chip are described. Pure SnO2 and WO3 as well as Pd- and Pt-doped SnO2 films are characterized in terms of their sensitivity to H2O2. The sensing films have been prepared by drop-coating of water-dispensed nano-powders. A physical characterization, including scanning electron microscopy and X-ray diffraction analysis of the deposited metal-oxide films, was done. From the measurements in hydrogen peroxide atmosphere, it could be shown, that all of the tested metal oxide films are suitable for the detection of H2O2 in the ppm range. The highest sensitivity and reproducibility was achieved using Pt-doped SnO2. Calibration plot of a SnO2, WO3, Pt-, and Pd-doped SnO2 gas sensor for H2O2 concentrations in the ppm range. | Notes: | FH Aachen, Inst Nano & Biotechnol, D-52428 Julich, Germany. SIG Combibloc Syst GmbH, D-52441 Linnich, Germany. Hasselt Univ, Inst Mat Res, B-3590 Diepenbeek, Belgium. Forschungszentrum Julich, Peter Grunberg Inst, D-52425 Julich, Germany. | Keywords: | Materials Science, Multidisciplinary; Physics, Applied; Physics, Condensed Matter;doped metal oxide; gas sensor; hydrogen peroxide; multi-sensor; tin oxide; tungsten oxide | Document URI: | http://hdl.handle.net/1942/15419 | ISSN: | 1862-6300 | e-ISSN: | 1862-6319 | DOI: | 10.1002/pssa.201200930 | ISI #: | 000319151900012 | Category: | A1 | Type: | Journal Contribution | Validations: | ecoom 2014 |
Appears in Collections: | Research publications |
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reisert 1.pdf Restricted Access | Published version | 625.71 kB | Adobe PDF | View/Open Request a copy |
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