Thick single crystal CVD diamond prepared from CH4-rich mixtures

Abstract

Recent interests in freestanding single-crystal CVD diamond (SC-CVD) discs for several applications in electronics led to an intense study of SC-CVD layer growth and properties. In this work we have investigated the growth mechanism of monocrystalline CVD diamond films with surfaces smooth in nanometer scale taking into account the defect incorporation in the SC-CVD layers. Specifically we discuss the surface structure characteristics for these conditions as studied with high-resolution AFM mapping. The as-grown CVD layers were removed from the substrate by laser cutting, followed by a polishing step, yielding freestanding plates. Subsequently, microscopic and colour studies as well as infrared absorption spectroscopy were performed. These investigations revealed the presence of several characteristic defects and impurities