Wide range pressure sensor based on a piezoelectric bimorph microcantilever

Abstract

Since the development of the atomic force microscope, interest in microfabricated cantilevers has grown. Cantilevers are excellent micromechanical sensors. In this work, we use a commercially available piezoelectric bimorph cantilever as pressure and temperature sensor. The piezoelectric layer acts as both sensor and actuator. The sensor detects the change in the resonance frequencies due to the drag force of the surrounding gas. The frequency shift of the resonant modes is measured as a function of the pressure and the temperature. The results show that both pressure and temperature can be measured simultaneously using the piezoelectric bimorph cantilever's resonant frequencies.