Please use this identifier to cite or link to this item:
http://hdl.handle.net/1942/16467| Title: | Aqueous chemical solution deposition of LuFeO3 thin high-k films | Authors: | GIELIS, Sven PEYS, Nick DEWULF, Daan PAVLOVIC, Nikolina VAN ELSCHOCHT, Sven DE GENDT, Stefan HARDY, An VAN BAEL, Marlies |
Issue Date: | 2012 | Source: | WE Heraeus-Physics School on "Microelectronics for Society – More than Moore expands More Moore", Bad Honnef - Germany, 10-16 June 2012 | Document URI: | http://hdl.handle.net/1942/16467 | Category: | C2 | Type: | Conference Material |
| Appears in Collections: | Research publications |
Show full item record
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.