Aqueous chemical solution deposition of LuFeO3 thin high-k films

Please use this identifier to cite or link to this item: http://hdl.handle.net/1942/16467

Title:	Aqueous chemical solution deposition of LuFeO3 thin high-k films
Authors:	GIELIS, Sven PEYS, Nick DEWULF, Daan PAVLOVIC, Nikolina VAN ELSCHOCHT, Sven DE GENDT, Stefan HARDY, An VAN BAEL, Marlies
Issue Date:	2012
Source:	WE Heraeus-Physics School on "Microelectronics for Society – More than Moore expands More Moore", Bad Honnef - Germany, 10-16 June 2012
Document URI:	http://hdl.handle.net/1942/16467
Category:	C2
Type:	Conference Material
Appears in Collections:	Research publications

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