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http://hdl.handle.net/1942/16681
Title: | Ultra-thin nanocrystalline diamond membranes as pressure sensors for harsh environments | Authors: | JANSSENS, Stoffel DRIJKONINGEN, Sien HAENEN, Ken |
Issue Date: | 2014 | Source: | APPLIED PHYSICS LETTERS, 104 (7), (ART N° 073107) | Abstract: | Glass and diamond are suitable materials for harsh environments. Here, a procedure for fabricating ultra-thin nanocrystalline diamond membranes on glass, acting as an electrically insulating substrate, is presented. In order to investigate the pressure sensing properties of such membranes, a circular, highly conductive boron-doped nanocrystalline diamond membrane with a resistivity of 38 mΩ cm, a thickness of 150 nm, and a diameter of 555 μm is fabricated in the middle of a Hall bar structure. During the application of a positive differential pressure under the membrane (0–0.7 bar), four point piezoresistive effect measurements are performed. From these measurements, it can be concluded that the resistance response of the membrane, as a function of differential pressure, is highly linear and sensitive. | Notes: | Janssens, SD (reprint author), Hasselt Univ, Inst Mat Res IMO, Wetenschapspk 1, B-3590 Diepenbeek, Belgium, stoffel.d.janssens@gmail.com; ken.haenen@uhasselt.be | Document URI: | http://hdl.handle.net/1942/16681 | ISSN: | 0003-6951 | e-ISSN: | 1077-3118 | DOI: | 10.1063/1.4866028 | ISI #: | 000332038500059 | Rights: | © 2014 AIP Publishing LLC | Category: | A1 | Type: | Journal Contribution | Validations: | ecoom 2015 |
Appears in Collections: | Research publications |
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1.4866028.pdf Restricted Access | Published version | 1.09 MB | Adobe PDF | View/Open Request a copy |
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