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|Title:||Ultra-thin nanocrystalline diamond membranes as pressure sensors for harsh environments||Authors:||JANSSENS, Stoffel
|Issue Date:||2014||Source:||APPLIED PHYSICS LETTERS, 104 (7), (ART N° 073107)||Abstract:||Glass and diamond are suitable materials for harsh environments. Here, a procedure for fabricating ultra-thin nanocrystalline diamond membranes on glass, acting as an electrically insulating substrate, is presented. In order to investigate the pressure sensing properties of such membranes, a circular, highly conductive boron-doped nanocrystalline diamond membrane with a resistivity of 38 mΩ cm, a thickness of 150 nm, and a diameter of 555 μm is fabricated in the middle of a Hall bar structure. During the application of a positive differential pressure under the membrane (0–0.7 bar), four point piezoresistive effect measurements are performed. From these measurements, it can be concluded that the resistance response of the membrane, as a function of differential pressure, is highly linear and sensitive.||Notes:||Janssens, SD (reprint author), Hasselt Univ, Inst Mat Res IMO, Wetenschapspk 1, B-3590 Diepenbeek, Belgium, firstname.lastname@example.org; email@example.com||Document URI:||http://hdl.handle.net/1942/16681||ISSN:||0003-6951||e-ISSN:||1077-3118||DOI:||10.1063/1.4866028||ISI #:||000332038500059||Rights:||© 2014 AIP Publishing LLC||Category:||A1||Type:||Journal Contribution||Validations:||ecoom 2015|
|Appears in Collections:||Research publications|
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