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Title: Ultra-thin nanocrystalline diamond membranes as pressure sensors for harsh environments
Authors: JANSSENS, Stoffel 
Issue Date: 2014
Source: APPLIED PHYSICS LETTERS, 104 (7), (ART N° 073107)
Abstract: Glass and diamond are suitable materials for harsh environments. Here, a procedure for fabricating ultra-thin nanocrystalline diamond membranes on glass, acting as an electrically insulating substrate, is presented. In order to investigate the pressure sensing properties of such membranes, a circular, highly conductive boron-doped nanocrystalline diamond membrane with a resistivity of 38 mΩ cm, a thickness of 150 nm, and a diameter of 555 μm is fabricated in the middle of a Hall bar structure. During the application of a positive differential pressure under the membrane (0–0.7 bar), four point piezoresistive effect measurements are performed. From these measurements, it can be concluded that the resistance response of the membrane, as a function of differential pressure, is highly linear and sensitive.
Notes: Janssens, SD (reprint author), Hasselt Univ, Inst Mat Res IMO, Wetenschapspk 1, B-3590 Diepenbeek, Belgium,;
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ISSN: 0003-6951
e-ISSN: 1077-3118
DOI: 10.1063/1.4866028
ISI #: 000332038500059
Rights: © 2014 AIP Publishing LLC
Category: A1
Type: Journal Contribution
Validations: ecoom 2015
Appears in Collections:Research publications

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