Please use this identifier to cite or link to this item: http://hdl.handle.net/1942/16754
Title: Transparent conducting oxide films of group V doped titania prepared by aqueous chemical solution deposition
Authors: ELEN, Ken 
Capon, Boris
DE DOBBELAERE, Christopher 
DEWULF, Daan 
PEYS, Nick 
Detavernier, Christophe
HARDY, An 
VAN BAEL, Marlies 
Issue Date: 2014
Source: THIN SOLID FILMS, 555, p. 33-38
Abstract: Transparent conducting oxide (TCO) films of titania doped with vanadium (V), niobium (Nb) and tantalum(Ta) are obtained by aqueous Chemical Solution Deposition (CSD). The effect of the dopant on the crystallization and microstructure of the resulting films is examined by means of X-ray diffraction and electron microscopy. During annealing of the thin films, in-situ characterization of the crystal structure and sheet resistance is carried out. Niobium doped anatase films, obtained after annealing in forming gas, show a resistivity of 0,28 Ohm cm, which is the lowest resistivity reported for a solution deposited anatase-based TCO so far. Here, we demonstrate that aqueous CSD may provide a strategy for scalable TCO production in the future.
Keywords: transparent conducting oxide; ceramic; TiO2; solution based synthesis; sol-gel chemistry
Document URI: http://hdl.handle.net/1942/16754
ISSN: 0040-6090
e-ISSN: 1879-2731
DOI: 10.1016/j.tsf.2013.05.104
ISI #: 000331546400008
Rights: © 2013 Elsevier B.V. All rights reserved.
Category: A1
Type: Journal Contribution
Validations: ecoom 2015
Appears in Collections:Research publications

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