Please use this identifier to cite or link to this item: http://hdl.handle.net/1942/17048
Title: Multiparameter Sensor Chip with Barium Strontium Titanate as Multipurpose Material
Authors: HUCK, Christina 
Poghossian, Arshak
Kerroumi, Iman
Schusser, Sebastian
BACKER, Matthias 
Zander, Willi
Schubert, Jürgen
Buniatyan, Vahe V.
Martirosyan, Norayr W.
WAGNER, Patrick 
Schöning, Michael J.
Issue Date: 2014
Publisher: WILEY-V C H VERLAG GMBH
Source: ELECTROANALYSIS, 26 (5), p. 980-987
Abstract: It is well known that biochemical and biotechnological processes are strongly dependent and affected by a variety of physico-chemical parameters such as pH value, temperature, pressure and electrolyte conductivity. Therefore, these quantities have to be monitored or controlled in order to guarantee a stable process operation, optimization and high yield. In this work, a sensor chip for the multiparameter detection of three physico-chemical parameters such as electrolyte conductivity, pH and temperature is realized using barium strontium titanate (BST) as multipurpose material. The chip integrates a capacitively coupled four-electrode electrolyte-conductivity sensor, a capacitive field-effect pH sensor and a thin-film Pt-temperature sensor. Due to the multifunctional properties of BST, it is utilized as final outermost coating layer of the processed sensor chip and serves as passivation and protection layer as well as pH-sensitive transducer material at the same time. The results of testing of the individual sensors of the developed multiparameter sensor chip are presented. In addition, a quasi-simultaneous multiparameter characterization of the sensor chip in buffer solutions with different pH value and electrolyte conductivity is performed. To study the sensor behavior and the suitability of BST as multifunctional material under harsh environmental conditions, the sensor chip was exemplarily tested in a biogas digestate.
Notes: [Huck, Christina; Poghossian, Arshak; Schusser, Sebastian; Backer, Matthias; Schoning, Michael J.] INB, D-52428 Julich, Germany. [Huck, Christina; Poghossian, Arshak; Schusser, Sebastian; Backer, Matthias; Zander, Willi; Schubert, Juergen; Schoning, Michael J.] PGI, D-52525 Julich, Germany. [Buniatyan, Vahe V.; Martirosyan, Norayr W.] State Engn Univ Armenia, Dept Microelectron & Biomed Devices, Yerevan 0009, Armenia. [Wagner, Patrick] Hasselt Univ, IMO, B-3590 Diepenbeek, Belgium. a.poghossian@fz-juelich.de
Keywords: barium strontium titanate; multiparameter detection; pH sensor; electrolyte-conductivity sensor; temperature sensor;Barium strontium titanate; Multiparameter detection; pH sensor; Electrolyte-conductivity sensor; Temperature sensor
Document URI: http://hdl.handle.net/1942/17048
ISSN: 1040-0397
e-ISSN: 1521-4109
DOI: 10.1002/elan.201400076
ISI #: 000335997600012
Rights: © 2014 Wiley-VCH Verlag GmbH & Co. KGaA, Weinheim.
Category: A1
Type: Journal Contribution
Validations: ecoom 2015
Appears in Collections:Research publications

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