Please use this identifier to cite or link to this item: http://hdl.handle.net/1942/17172
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dc.contributor.authorJANSSEN, Wiebke-
dc.contributor.authorTURNER, Stuart-
dc.contributor.authorSakr, Georges-
dc.contributor.authorJomard, Franois-
dc.contributor.authorBarjon, Julien-
dc.contributor.authorDEGUTIS, Giedrius-
dc.contributor.authorLu, Ying-Gang-
dc.contributor.authorD'HAEN, Jan-
dc.contributor.authorHARDY, An-
dc.contributor.authorVAN BAEL, Marlies-
dc.contributor.authorVerbeeck, Johan-
dc.contributor.authorVan Tendeloo, Gustaaf-
dc.contributor.authorHAENEN, Ken-
dc.date.accessioned2014-09-23T08:29:32Z-
dc.date.available2014-09-23T08:29:32Z-
dc.date.issued2014-
dc.identifier.citationPHYSICA STATUS SOLIDI-RAPID RESEARCH LETTERS, 8 (8), p. 705-709-
dc.identifier.issn1862-6254-
dc.identifier.urihttp://hdl.handle.net/1942/17172-
dc.description.abstractNanocrystalline diamond (NCD) thin films were produced by chemical vapor deposition (CVD) and doped by the addition of phosphine to the gas mixture. The characterization of the films focused on probing the incorporation and distribution of the phosphorus (P) dopants. Electron microscopy evaluated the overall film morphology and revealed the interior structure of the nanosized grains. The homogeneous films with distinct diamond grains featured a notably low sp(2):sp(3)-ratio as confirmed by Raman spectroscopy. High resolution spectroscopy methods demonstrated a homogeneous P-incorporation, both in-depth and in-plane. The P concentration in the films was determined to be in the order of 10(19) cm(-3) with a significant fraction integrated at substitutional donor sites. (C) 2014 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim-
dc.description.sponsorshipThis work was financially supported by the EU FP7 through Marie Curie ITN MATCON (PITN-GA-2009-238201) and the Research Foundation Flanders (FWO) (G.0555.10N, G.0568.10N, G.0456.12 and a post-doctoral fellowship for S. T.) G. V. T. acknowledges the ERC Grant N246791-COUNTATOMS. Moreover, financial support from the EU FP7 under a contract for an Integrated Infrastructure Initiative (312483-ESTEEM2) is acknowledged.-
dc.language.isoen-
dc.publisherWILEY-V C H VERLAG GMBH-
dc.rights© 2014 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim.-
dc.subject.othernanocrystalline diamonds; phosphorus incorporation; chemical vapor deposition; spectroscopy methods-
dc.subject.othernanocrystalline diamonds; phosphorus incorporation; chemical vapor deposition; spectroscopy methods-
dc.titleSubstitutional phosphorus incorporation in nanocrystalline CVD diamond thin films-
dc.typeJournal Contribution-
dc.identifier.epage709-
dc.identifier.issue8-
dc.identifier.spage705-
dc.identifier.volume8-
local.format.pages5-
local.bibliographicCitation.jcatA1-
dc.description.notes[Janssen, Wiebke; Degutis, Giedrius; D'Haen, Jan; Hardy, An; Van Bael, Marlies; Haenen, Ken] Hasselt Univ, Inst Mat Res IMO, B-3590 Diepenbeek, Belgium. [Janssen, Wiebke; D'Haen, Jan; Hardy, An; Van Bael, Marlies; Haenen, Ken] IMEC VZW, IMOMEC, B-3590 Diepenbeek, Belgium. [Turner, Stuart; Lu, Ying-Gang; Verbeeck, Johan; Van Tendeloo, Gustaaf] Univ Antwerp, EMAT, B-2020 Antwerp, Belgium. [Sakr, Georges; Jomard, Franois; Barjon, Julien] Univ Versailles St Quentin, CNRS, GEMaC, F-78035 Versailles, France.-
local.publisher.placeWEINHEIM-
local.type.refereedRefereed-
local.type.specifiedArticle-
dc.identifier.doi10.1002/pssr.201409235-
dc.identifier.isi000340484100007-
item.validationecoom 2015-
item.fulltextWith Fulltext-
item.contributorJANSSEN, Wiebke-
item.contributorTURNER, Stuart-
item.contributorSakr, Georges-
item.contributorJomard, Franois-
item.contributorBarjon, Julien-
item.contributorDEGUTIS, Giedrius-
item.contributorLu, Ying-Gang-
item.contributorD'HAEN, Jan-
item.contributorHARDY, An-
item.contributorVAN BAEL, Marlies-
item.contributorVerbeeck, Johan-
item.contributorVan Tendeloo, Gustaaf-
item.contributorHAENEN, Ken-
item.accessRightsClosed Access-
item.fullcitationJANSSEN, Wiebke; TURNER, Stuart; Sakr, Georges; Jomard, Franois; Barjon, Julien; DEGUTIS, Giedrius; Lu, Ying-Gang; D'HAEN, Jan; HARDY, An; VAN BAEL, Marlies; Verbeeck, Johan; Van Tendeloo, Gustaaf & HAENEN, Ken (2014) Substitutional phosphorus incorporation in nanocrystalline CVD diamond thin films. In: PHYSICA STATUS SOLIDI-RAPID RESEARCH LETTERS, 8 (8), p. 705-709.-
crisitem.journal.issn1862-6254-
crisitem.journal.eissn1862-6270-
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