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Title: | Change of diamond film structure and morphology with N-2 addition in MW PECVD apparatus with linear antenna delivery system | Authors: | Krecmarova, Marie Jakl Petrak, Vaclav Taylor, Andrew KAMATCHI JOTHIRAMALINGAM, Sankaran Lin, I-Nan Jaeger, Ales Gaertnerova, Viera Fekete, Ladislav Drahokoupil, Jan Laufek, Frantisek Vacik, Jiri Hubik, Pavel MORTET, Vincent NESLADEK, Milos |
Issue Date: | 2014 | Publisher: | WILEY-V C H VERLAG GMBH | Source: | PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE, 211 (10), p. 2296-2301 | Abstract: | Deposition of nano-crystalline diamond (NCD) over large areas is of high interest for industrial applications. For instance NCD is an excellent substrate for cell growth but it is also interesting for photonic applications associated with nitrogen-vacancy (NV) centres. There have been many studies on the effect of nitrogen addition on the growth of diamond using conventional resonance cavity microwave plasmas (both H and Ar based) but none using MW PECVD apparatus with linear antenna delivery system (MW-LA-PECVD). In this work, we show that an ultra nano-crystalline diamond (UNCD) type of morphology can be prepared upon N-2 addition to H2CO2CH4 plasmas at low pressures (0.3mbar) and low temperature (520 degrees C); however, these films despite their UNCD character show sp(3) dominated Raman spectra and highly isolating behavior. The crystalline structure and morphology of the films were characterized by scanning electron microscopy, atomic force microscopy, Raman spectroscopy, grazing angle X-ray diffraction, and transmission electron microscopy. Diamond films' composition was evaluated from thermal neutron depth profiling. Films were also characterized by photoluminescence spectroscopy to study the incorporation of luminescent NV centre. Addition of nitrogen increases deposition rate and dramatically changes surface morphology and crystalline structure from well faceted diamond crystals to UNCD like morphology. (C) 2014 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim | Notes: | [Krecmarova, Marie Jakl; Petrak, Vaclav; Taylor, Andrew; Mortet, Vincent] Czech Tech Univ, Fac Biomed Engn, Prague 27201, Czech Republic. [Krecmarova, Marie Jakl; Petrak, Vaclav; Taylor, Andrew; Jaeger, Ales; Gaertnerova, Viera; Fekete, Ladislav; Drahokoupil, Jan; Laufek, Frantisek; Mortet, Vincent] Acad Sci Czech Republic, Inst Phys, Vvi, Prague 18221 8, Czech Republic. [Sankaran, Kamatchi Jothiramalingam; Lin, I-Nan] Tamkang Univ, Dept Phys, Tamsui 251, Taiwan. [Vacik, Jiri] Acad Sci Czech Republic, Inst Nucl Phys, Vvi, Prague, Czech Republic. [Hubik, Pavel] Acad Sci Czech Republic, Inst Phys, Vvi, CR-16200 Prague 6, Czech Republic. [Nesladek, Milos] Univ Hasselt, Inst Mat Res, Div Mat Phys, B-3590 Diepenbeek, Belgium. [Nesladek, Milos] IMOMEC Div IMEC, B-3590 Diepenbeek, Belgium. | Keywords: | linear antenna; nano-diamond; nitrogen doping; TEM; Raman spectroscopy;linear antenna; nano-diamond; nitrogen doping; TEM; Raman spectroscopy | Document URI: | http://hdl.handle.net/1942/18056 | ISSN: | 1862-6300 | e-ISSN: | 1862-6319 | DOI: | 10.1002/pssa.201431255 | ISI #: | 000344241100014 | Rights: | © 2014 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim. | Category: | A1 | Type: | Journal Contribution | Validations: | ecoom 2015 |
Appears in Collections: | Research publications |
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