Please use this identifier to cite or link to this item: http://hdl.handle.net/1942/18056
Title: Change of diamond film structure and morphology with N-2 addition in MW PECVD apparatus with linear antenna delivery system
Authors: Krecmarova, Marie Jakl
Petrak, Vaclav
Taylor, Andrew
KAMATCHI JOTHIRAMALINGAM, Sankaran 
Lin, I-Nan
Jaeger, Ales
Gaertnerova, Viera
Fekete, Ladislav
Drahokoupil, Jan
Laufek, Frantisek
Vacik, Jiri
Hubik, Pavel
MORTET, Vincent 
NESLADEK, Milos 
Issue Date: 2014
Publisher: WILEY-V C H VERLAG GMBH
Source: PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE, 211 (10), p. 2296-2301
Abstract: Deposition of nano-crystalline diamond (NCD) over large areas is of high interest for industrial applications. For instance NCD is an excellent substrate for cell growth but it is also interesting for photonic applications associated with nitrogen-vacancy (NV) centres. There have been many studies on the effect of nitrogen addition on the growth of diamond using conventional resonance cavity microwave plasmas (both H and Ar based) but none using MW PECVD apparatus with linear antenna delivery system (MW-LA-PECVD). In this work, we show that an ultra nano-crystalline diamond (UNCD) type of morphology can be prepared upon N-2 addition to H2CO2CH4 plasmas at low pressures (0.3mbar) and low temperature (520 degrees C); however, these films despite their UNCD character show sp(3) dominated Raman spectra and highly isolating behavior. The crystalline structure and morphology of the films were characterized by scanning electron microscopy, atomic force microscopy, Raman spectroscopy, grazing angle X-ray diffraction, and transmission electron microscopy. Diamond films' composition was evaluated from thermal neutron depth profiling. Films were also characterized by photoluminescence spectroscopy to study the incorporation of luminescent NV centre. Addition of nitrogen increases deposition rate and dramatically changes surface morphology and crystalline structure from well faceted diamond crystals to UNCD like morphology. (C) 2014 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim
Notes: [Krecmarova, Marie Jakl; Petrak, Vaclav; Taylor, Andrew; Mortet, Vincent] Czech Tech Univ, Fac Biomed Engn, Prague 27201, Czech Republic. [Krecmarova, Marie Jakl; Petrak, Vaclav; Taylor, Andrew; Jaeger, Ales; Gaertnerova, Viera; Fekete, Ladislav; Drahokoupil, Jan; Laufek, Frantisek; Mortet, Vincent] Acad Sci Czech Republic, Inst Phys, Vvi, Prague 18221 8, Czech Republic. [Sankaran, Kamatchi Jothiramalingam; Lin, I-Nan] Tamkang Univ, Dept Phys, Tamsui 251, Taiwan. [Vacik, Jiri] Acad Sci Czech Republic, Inst Nucl Phys, Vvi, Prague, Czech Republic. [Hubik, Pavel] Acad Sci Czech Republic, Inst Phys, Vvi, CR-16200 Prague 6, Czech Republic. [Nesladek, Milos] Univ Hasselt, Inst Mat Res, Div Mat Phys, B-3590 Diepenbeek, Belgium. [Nesladek, Milos] IMOMEC Div IMEC, B-3590 Diepenbeek, Belgium.
Keywords: linear antenna; nano-diamond; nitrogen doping; TEM; Raman spectroscopy;linear antenna; nano-diamond; nitrogen doping; TEM; Raman spectroscopy
Document URI: http://hdl.handle.net/1942/18056
ISSN: 1862-6300
e-ISSN: 1862-6319
DOI: 10.1002/pssa.201431255
ISI #: 000344241100014
Rights: © 2014 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim.
Category: A1
Type: Journal Contribution
Validations: ecoom 2015
Appears in Collections:Research publications

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