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http://hdl.handle.net/1942/20809| Title: | Sol–Gel Deposition of Ultrathin High-κ Dielectric Films | Authors: | HARDY, An VAN BAEL, Marlies |
Issue Date: | 2015 | Publisher: | Wiley VCH Verlag | Source: | Levy, David; Zayat, Marcos (Ed.). The Sol-Gel Handbook: Synthesis, Characterization and Applications, 3-Volume Set, p. 767-786 | Document URI: | http://hdl.handle.net/1942/20809 | ISBN: | 978-3-527-33486-5 | Category: | B2 | Type: | Book Section |
| Appears in Collections: | Research publications |
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