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http://hdl.handle.net/1942/22735
Title: | The pressure sensitivity of wrinkled B-doped nanocrystalline diamond membranes | Authors: | DRIJKONINGEN, Sien JANSSENS, Stoffel POBEDINSKAS, Paulius Koizumi, S. VAN BAEL, Marlies HAENEN, Ken |
Issue Date: | 2016 | Publisher: | NATURE PUBLISHING GROUP | Source: | SCIENTIFIC REPORTS, 6 (Art N° 35667) | Abstract: | Nanocrystalline diamond (NCD) membranes are promising candidates for use as sensitive pressure sensors. NCD membranes are able to withstand harsh conditions and are easily fabricated on glass. In this study the sensitivity of heavily boron doped NCD (B:NCD) pressure sensors is evaluated with respect to different types of supporting glass substrates, doping levels and membrane sizes. Higher pressure sensing sensitivities are obtained for membranes on Corning Eagle 2000 glass, which have a better match in thermal expansion coefficient with diamond compared to those on Schott AF45 glass. In addition, it is shown that larger and more heavily doped membranes are more sensitive. After fabrication of the membranes, the stress in the B:NCD films is released by the emergence of wrinkles. A better match between the thermal expansion coefficient of the NCD layer and the underlying substrate results in less stress and a smaller amount of wrinkles as confirmed by Raman spectroscopy and 3D surface imaging. | Notes: | [Drijkoningen, S.; Janssens, S. D.; Pobedinskas, P.; Van Bael, M. K.; Haenen, K.] Hasselt Univ, Inst Mat Res IMO, Diepenbeek, Belgium. [Drijkoningen, S.; Janssens, S. D.; Van Bael, M. K.; Haenen, K.] IMEC VZW, IMOMEC, Diepenbeek, Belgium. [Janssens, S. D.; Koizumi, S.] NIMS, Tsukuba, Ibaraki, Japan. [Koizumi, S.] Japan Sci & Technol Agcy JST AIST, Core Res Evolut Sci & Technol CREST, Tsukuba, Ibaraki, Japan. | Document URI: | http://hdl.handle.net/1942/22735 | ISSN: | 2045-2322 | e-ISSN: | 2045-2322 | DOI: | 10.1038/srep35667 | ISI #: | 000385830100001 | Rights: | © The Author(s) 2016. This work is licensed under a Creative Commons Attribution 4.0 International License. The images or other third party material in this article are included in the article’s Creative Commons license, unless indicated otherwise in the credit line; if the material is not included under the Creative Commons license, users will need to obtain permission from the license holder to reproduce the material. To view a copy of this license, visit http://creativecommons.org/licenses/by/4.0/ | Category: | A1 | Type: | Journal Contribution | Validations: | ecoom 2017 |
Appears in Collections: | Research publications |
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drijkoningen 1.pdf | Published version | 1.35 MB | Adobe PDF | View/Open |
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