Please use this identifier to cite or link to this item: http://hdl.handle.net/1942/22811
Title: Aqueous chemical solution deposition of ultra high-k LuFeO3 thin films
Authors: GIELIS, Sven 
Ivanov, Maksim
Peys, Nick
VAN DEN HAM, Jonathan 
PAVLOVIC, Nikolina 
Banys, Juras
HARDY, An 
VAN BAEL, Marlies 
Issue Date: 2017
Publisher: ELSEVIER SCI LTD
Source: JOURNAL OF THE EUROPEAN CERAMIC SOCIETY, 37(2), p. 611-617
Abstract: Thin orthorhombic ultra high-k LuFeO3 (LFO) films on Si3N4/SiO2/Si substrates were obtained by means of aqueous chemical solution deposition (CSD). Prior to thin film deposition, the precursor synthesis, thermal decomposition and crystallization behavior of the bulk material were studied. It was shown that phase-pure hexagonal LFO powder could be formed at 650 degrees C while a higher temperature of 900 degrees C was required to obtain the orthorhombic phase. Deposition on SiO2/Si resulted in the development of silicates in this temperature range, thus preventing the formation of the orthorhombic LuFeO3 phase. The use of Si3N4/SiO2/Si as the substrate shifted the silicate formation to higher temperature, allowing the synthesis of phase-pure orthorhombic LuFeO3 as a thin film at 1000 degrees C. Impedance spectroscopy analyses confirmed its associated ultra high dielectric constant (>10,000) at room temperature for frequencies lower than or equal to 1 kHz.
Notes: [Gielis, Sven; Peys, Nick; van den Ham, E. Jonathan; Pavlovic, Nikolina; Hardy, An; Van Bael, Marlies K.] Hasselt Univ, Inst Mat Res, Diepenbeek, Belgium. [Gielis, Sven; Peys, Nick; van den Ham, E. Jonathan; Pavlovic, Nikolina; Hardy, An; Van Bael, Marlies K.] Hasselt Univ, IMEC Vzw, Div IMOMEC, Inorgan & Phys Chem, Diepenbeek, Belgium. [Ivanov, Maksim; Banys, Juras] Vilnius Univ, Fac Phys, Vilnius, Lithuania.
Document URI: http://hdl.handle.net/1942/22811
ISSN: 0955-2219
e-ISSN: 1873-619X
DOI: 10.1016/j.jeurceramsoc.2016.08.042
ISI #: 000386643900021
Rights: (C) 2016 Elsevier Ltd. All rights reserved.
Category: A1
Type: Journal Contribution
Validations: ecoom 2017
Appears in Collections:Research publications

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