Please use this identifier to cite or link to this item:
http://hdl.handle.net/1942/2403
Title: | A model for the behaviour of tensile and compressive residual stresses developed in thin films produced by ion beam-assisted deposition techniques | Authors: | KNUYT, Gilbert | Issue Date: | 2004 | Publisher: | ELSEVIER SCIENCE SA | Source: | THIN SOLID FILMS, 467(1-2). p. 275-283 | Abstract: | A theoretical model was developed in order to explain typical features of the in-plane residual stress behaviour of films deposited under particle bombardment. It was found that under a number of deposition conditions the stress will show a positive maximum (tensile stress) and will finally become negative (compressive) with increasing ion flux. But in other cases no maximum will be attained, and the stress will change smoothly from tensile to compressive values. The maximum possible tensile stress was found to decrease with increasing grain dimensions. Simple analytical expressions were derived which accurately describe the numerical results. The model reproduces a number of experimental facts on the stress behaviour, especially concerning the dependence on the ion flux and energy. Some other experimental data are discussed in the light of possible refinements of the model. (C) 2004 Elsevier B.V. All rights reserved. | Notes: | Limburgs Univ Ctr, Mat Res Inst, B-3590 Diepenbeek, Belgium.Knuyt, G, Limburgs Univ Ctr, Mat Res Inst, Wetenschapspark 1, B-3590 Diepenbeek, Belgium.gilbert.knuyt@luc.ac.be | Keywords: | tensile stress; compressive residual stress; thin films; ion beam-assisted deposition technique | Document URI: | http://hdl.handle.net/1942/2403 | ISSN: | 0040-6090 | e-ISSN: | 1879-2731 | DOI: | 10.1016/j.tsf.2004.04.050 | ISI #: | 000224185100046 | Category: | A1 | Type: | Journal Contribution | Validations: | ecoom 2005 |
Appears in Collections: | Research publications |
Show full item record
SCOPUSTM
Citations
7
checked on Sep 2, 2020
WEB OF SCIENCETM
Citations
8
checked on Apr 24, 2024
Page view(s)
80
checked on Jun 14, 2023
Google ScholarTM
Check
Altmetric
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.