Please use this identifier to cite or link to this item:
http://hdl.handle.net/1942/2405
Title: | Effect of diamond nucleation process on propagation losses of AlN/diamond SAW filter | Authors: | Elmazria, O El Hakiki, M MORTET, Vincent Assouar, Mohamed B. NESLADEK, Milos Vanecek, M Bergonzo, P Alnot, P |
Issue Date: | 2004 | Publisher: | IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC | Source: | IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL, 51(12). p. 1704-1709 | Abstract: | In this work, the effect of a diamond nucleation process on freestanding aluminium nitride (AlN)/diamond surface acoustic wave (SAW) device performances was studied. Before diamond deposition, silicon (Si) substrates have been mechanically nucleated, using an ultrasonic vibration table with submicron diamond slurry, and bias-enhanced nucleated (BEN). Freestanding diamond layers obtained on mechanically scratched Si substrates exhibit a surface roughness of R-MS = 13 nm, whereas very low surface roughness (as low as RMS less than or equal to 1 nm) can be achieved on a freestanding BEN diamond layer. Propagation losses have been measured as a function of the operating frequency for the two nucleation techniques. Dispersion curves of phase velocities and electromechanical coupling coefficient (K-2) were determined experimentally and by calculation as a function of normalized thickness AlN film (kh(AlN) = 2pih(AlN)/lambda). Experimental results show that the propagation losses strongly depend on the nucleation technique, and that these losses are weakly increased with frequency when the BEN technique is used. | Notes: | Univ H Poincare Nancy 1, LPMIA, UMR 7040, F-54506 Vandoeuvre Les Nancy, France. Acad Sci Czech Republ, Inst Phys, CZ-16253 Prague 6, Czech Republic. IMEC Vzw, Div IMOMEC, B-3590 Diepenbeek, Belgium. Limburgs Univ Ctr, IMO, B-3590 Diepenbeek, Belgium. CEA Saclay, DIMRI, SIAR, F-91191 Gif Sur Yvette, France.Elmazria, O, Univ H Poincare Nancy 1, LPMIA, UMR 7040, F-54506 Vandoeuvre Les Nancy, France.omar.elmazria@lpmi.uhp-nancy.fr | Document URI: | http://hdl.handle.net/1942/2405 | ISSN: | 0885-3010 | e-ISSN: | 1525-8955 | DOI: | 10.1109/TUFFC.2004.1386688 | ISI #: | 000226247400013 | Category: | A1 | Type: | Journal Contribution | Validations: | ecoom 2006 |
Appears in Collections: | Research publications |
Show full item record
SCOPUSTM
Citations
26
checked on Sep 2, 2020
WEB OF SCIENCETM
Citations
24
checked on Sep 4, 2024
Page view(s)
54
checked on Sep 7, 2022
Google ScholarTM
Check
Altmetric
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.