Please use this identifier to cite or link to this item: http://hdl.handle.net/1942/2416
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dc.contributor.authorMarson, S-
dc.contributor.authorDorey, RA-
dc.contributor.authorZhang, Q-
dc.contributor.authorWhatmore, RW-
dc.contributor.authorHARDY, An-
dc.contributor.authorMULLENS, Jules-
dc.date.accessioned2007-11-14T07:52:34Z-
dc.date.available2007-11-14T07:52:34Z-
dc.date.issued2004-
dc.identifier.citationJOURNAL OF THE EUROPEAN CERAMIC SOCIETY, 24(6). p. 1925-1928-
dc.identifier.issn0955-2219-
dc.identifier.urihttp://hdl.handle.net/1942/2416-
dc.description.abstractA highly concentrated solution for producing photopatternable layers of lead zirconate titanate (PZT) was prepared by dissolving into acrylic acid an amorphous PZT powder which was obtained by a sol-gel process. The solution was found to be suitable for spin-coating PZT layers that are photosensitive to UV radiation. After deposition and subsequent exposure the PZT film showed a decreased solubility in several organic compounds. These properties were exploited to create features on platinised silicon (Si) substrates. A thermogravimetric analysis was performed on the solution to determine the best thermal profile for the burn out of the organics. PZT features up to 2 mum thick were obtained after the firing process. (C) 2003 Elsevier Ltd. All rights reserved.-
dc.language.isoen-
dc.publisherELSEVIER SCI LTD-
dc.subject.otherdrying; films; photopatterning; PZT; sol-gel process-
dc.titleDirect patterning of photosensitive chemical solution deposition PZT layers-
dc.typeJournal Contribution-
dc.identifier.epage1928-
dc.identifier.issue6-
dc.identifier.spage1925-
dc.identifier.volume24-
local.format.pages4-
local.bibliographicCitation.jcatA1-
dc.description.notesCranfield Univ, Sch Ind & Mfg Sci, Nanotechnol Grp, Cranfield MK43 0AL, Beds, England. Limburgs Univ Ctr, Lab Inorgan & Phys Chem, Diepenbeek, Belgium.Dorey, RA, Cranfield Univ, Sch Ind & Mfg Sci, Nanotechnol Grp, Cranfield MK43 0AL, Beds, England.r.a.dorey@cranfield.ac.uk-
local.type.refereedRefereed-
local.type.specifiedArticle-
dc.bibliographicCitation.oldjcatA1-
dc.identifier.doi10.1016/S0955-2219(03)00543-0-
dc.identifier.isi000189247800205-
item.accessRightsClosed Access-
item.fullcitationMarson, S; Dorey, RA; Zhang, Q; Whatmore, RW; HARDY, An & MULLENS, Jules (2004) Direct patterning of photosensitive chemical solution deposition PZT layers. In: JOURNAL OF THE EUROPEAN CERAMIC SOCIETY, 24(6). p. 1925-1928.-
item.contributorMarson, S-
item.contributorDorey, RA-
item.contributorZhang, Q-
item.contributorWhatmore, RW-
item.contributorHARDY, An-
item.contributorMULLENS, Jules-
item.fulltextNo Fulltext-
item.validationecoom 2005-
crisitem.journal.issn0955-2219-
crisitem.journal.eissn1873-619X-
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