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Title: | Chemical solution deposition of ZnO thin films by an aqueous solution gel precursor route | Authors: | MONDELAERS, Dirk VANHOYLAND, Geert VAN DEN RUL, Heidi D'HAEN, Jan VAN BAEL, Marlies MULLENS, Jules VAN POUCKE, Lucien |
Issue Date: | 2003 | Publisher: | KLUWER ACADEMIC PUBL | Source: | JOURNAL OF SOL-GEL SCIENCE AND TECHNOLOGY, 26(1-3). p. 523-526 | Abstract: | An aqueous chemical solution deposition method was used to prepare thin films of ZnO on SiO2/Si (1 1 1) substrates. Starting from an aqueous solution of Zn acetate, citric acid and ammonia, very thin films could be deposited by spin coating. Heating parameters, necessary for thin film annealing, were determined using FTIR experiments on dried gel precursors, heated up to different temperatures. The morphology and the thickness of the films were investigated by SEM. It is found that homogeneous thin films with grain sizes of about 20 nm are formed. XRD experiments show that there is an indication that the films, crystallized at 500degreesC, exhibit preferential grain growth along the c-axis. | Notes: | Limburgs Univ Ctr, IMO, Lab Inorgan & Phys Chem, B-3590 Diepenbeek, Belgium. Limburgs Univ Ctr, IMO, Div Mat Phys, B-3590 Diepenbeek, Belgium.Mullens, J, Limburgs Univ Ctr, IMO, Lab Inorgan & Phys Chem, Univ Campus, B-3590 Diepenbeek, Belgium. | Keywords: | ZnO; thin film; precursor chemistry; aqueous chemical solution deposition | Document URI: | http://hdl.handle.net/1942/2449 | ISSN: | 0928-0707 | e-ISSN: | 1573-4846 | DOI: | 10.1023/A:1020703500515 | ISI #: | 000178789100093 | Category: | A1 | Type: | Journal Contribution | Validations: | ecoom 2003 |
Appears in Collections: | Research publications |
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