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Title: | Laser Assisted Patterning of a-Si:H: Detailed Investigation of Laser Damage | Authors: | Xu, Menglei Bearda, Twan Radhakrishnan, Hariharsudan S. Filipic, Miha GORDON, Ivan Debucquoy, Maarten Szlufcik, Jozef POORTMANS, Jef |
Issue Date: | 2017 | Publisher: | WILEY-V C H VERLAG GMBH | Source: | PHYSICA STATUS SOLIDI-RAPID RESEARCH LETTERS, 11(9), p. 1-5 (Art N° 1700125) | Abstract: | A detailed investigation of the laser damage to amorphous silicon (a-Si:H) layers patterned by laser ablation (LA) and wet chemical etching is presented. This approach can be applied to pattern the rear side of silicon hetero-junction interdigitated back-contact solar cells. Only the top sacrificial a-Si: H laser-absorbing layer of an a-Si:H/SiOx/a-Si:H/c-Si stack is ablated. Laser damage in the bottom a-Si:H layer and a-Si:H/c-Si interface is analyzed by both scanning electron microscopy and transmission electron microscopy. We show that the a-Si:H/c-Si passivation is degraded by laser damage and that this degradation can be diminished by increasing laser processing speed. This is attributed to a decrease of laser-irradiated area, and particularly smaller overlapping zones of adjacent laser pulses. The re-passivation quality after LA and wet etching is similar to that of as-passivated samples. This indicates that laser damage is not present in the bulk c-Si substrate but only in the a-Si: H passivation layer, which is removed during subsequent wet etching, thus allowing high quality repassivation. | Notes: | [Xu, Menglei; Bearda, Twan; Radhakrishnan, Hariharsudan S.; Filipic, Miha; Gordon, Ivan; Debucquoy, Maarten; Szlufcik, Jozef; Poortmans, Jef] IMEC, Kapeldreef 75, B-3001 Heverlee, Belgium. [Xu, Menglei; Poortmans, Jef] Katholieke Univ Leuven, Kasteelpk Arenberg 10, B-3001 Heverlee, Belgium. [Poortmans, Jef] Hasselt Univ, B-3500 Hasselt, Belgium. | Keywords: | amorphous silicon; heterojunctions; laser ablation; passivation; patterning; silicon;amorphous silicon; heterojunctions; laser ablation; passivation; patterning; silicon | Document URI: | http://hdl.handle.net/1942/24978 | ISSN: | 1862-6254 | e-ISSN: | 1862-6270 | DOI: | 10.1002/pssr.201700125 | ISI #: | 000410132200001 | Rights: | © 2017 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim | Category: | A1 | Type: | Journal Contribution | Validations: | ecoom 2018 |
Appears in Collections: | Research publications |
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