Please use this identifier to cite or link to this item: http://hdl.handle.net/1942/2505
Title: Aqueous chemical solution deposition of ferroelectric thin films
Authors: VAN BAEL, Marlies 
NELIS, Daniel 
HARDY, An 
MONDELAERS, Dirk 
VAN WERDE, Kristof 
D'HAEN, Jan 
VANHOYLAND, Geert 
VAN DEN RUL, Heidi 
MULLENS, Jules 
VAN POUCKE, Lucien 
FREDERIX, Filip 
Wouters, DJ
Issue Date: 2002
Publisher: TAYLOR & FRANCIS LTD
Source: INTEGRATED FERROELECTRICS, 45. p. 113-122
Abstract: Thin films of various ferroelectric multimetal oxides such as (Bi1-xLax)(4)Ti3O12(BLT), SrBi2Ta2O9 (SBT) and PbZr1-xTixO3 (PZT) have been prepared by an entirely aqueous chemical solution deposition (CSD) route. Two critical issues related with aqueous CSD have hereby been worked out: in spite of the high degree of hydrolysis of tetra- and pentavalent metal ions (Ti4+ , Zr4+ , Ta5+, ...) we managed to prepare stable aqueous precursor solutions by chemical modification of these individual metals, avoiding phase segregation. Another problem related with aqueous CSD is the wetting of the substrate (both metallic and metal oxide) by the aqueous solution. The hydrophilicity of the substrates is optimized by a chemical treatment of the substrate surface. In this manner, the addition of wetting agents, hence possibly disturbing the gelation reactions, is avoided. In order to study the gelation, decomposition, crystalization and the morphology of the thin films, various characterization techniques ((cryo-)TEM, SEM, EDX, TGA-MS/FTIR, HT-DRIFT, HT-XRD, ...) are used.
Notes: Limburgs Univ Ctr, Lab Inorgan & Phys Chem, IMO, B-3590 Diepenbeek, Belgium. Limburgs Univ Ctr, IMOMEC, IMO, B-3590 Diepenbeek, Belgium. Limburgs Univ Ctr, Phys Anal Grp, IMO, B-3590 Diepenbeek, Belgium. IMEC, B-3001 Heverlee, Belgium.Van Bael, MK, Limburgs Univ Ctr, Lab Inorgan & Phys Chem, IMO, B-3590 Diepenbeek, Belgium.
Document URI: http://hdl.handle.net/1942/2505
ISSN: 1058-4587
e-ISSN: 1607-8489
ISI #: 000179828300015
Category: A1
Type: Journal Contribution
Validations: ecoom 2004
Appears in Collections:Research publications

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