Please use this identifier to cite or link to this item:
http://hdl.handle.net/1942/27686
Title: | Dry etch damage in n-type crystalline silicon wafers assessed by deep-level transient spectroscopy and minority carrier lifetime | Authors: | Simoen, Eddy Radhakrishnan, Hariharsudan Sivaramakrishnan Uddin, Md Gius GORDON, Ivan POORTMANS, Jef Wang, Chong Li, Wei |
Issue Date: | 2018 | Publisher: | A V S AMER INST PHYSICS | Source: | JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 36(4) (Art N° 041201) | Abstract: | This paper compares the electrically active damage in dry-etched n-type float-zone silicon, using NF3/Ar or H-2-plasma exposure and assessed by deep-level transient spectroscopy (DLTS) and recombination lifetime analysis. It is shown that the NF3/Ar-plasma damage consists of at least four different types of electron traps in the upper half of the band gap, which can be associated with vacancy-and vacancy-impurity-related complexes. In the case of H-2-plasma damage, it is believed that the accumulation of point defects results in a gradual disordering of the near-surface layer. These defect levels also act as recombination centers, judged by the fact that they degrade the minority carrier lifetime. It is finally shown that lifetime measurements are more sensitive to the etching-induced damage than DLTS. | Notes: | [Simoen, Eddy; Radhakrishnan, Hariharsudan Sivaramakrishnan; Uddin, Md Gius; Gordon, Ivan; Poortmans, Jef] Imec, Kapeldreef 75, B-3001 Leuven, Belgium. [Wang, Chong; Li, Wei] Univ Elect Sci & Technol China, Sch Optoelect Informat, Chengdu 610054, Sichuan, Peoples R China. [Simoen, Eddy] Univ Ghent, Dept Solid State Sci, Krijgslaan 281 S1, B-9000 Ghent, Belgium. [Poortmans, Jef] Katholieke Univ Leuven, Dept Elect Engn, Kasteelpk Arenberg 10, B-3001 Heverlee, Belgium. [Poortmans, Jef] Univ Hasselt, Campus Diepenbeek,Agoralaan Gebouw D, B-3590 Diepenbeek, Belgium. | Document URI: | http://hdl.handle.net/1942/27686 | ISSN: | 1071-1023 | DOI: | 10.1116/1.5026529 | ISI #: | 000440045700014 | Category: | A1 | Type: | Journal Contribution |
Appears in Collections: | Research publications |
Files in This Item:
File | Description | Size | Format | |
---|---|---|---|---|
simoen2018.pdf Restricted Access | Published version | 3.41 MB | Adobe PDF | View/Open Request a copy |
SCOPUSTM
Citations
4
checked on Sep 5, 2020
WEB OF SCIENCETM
Citations
6
checked on Oct 12, 2024
Page view(s)
128
checked on Sep 5, 2022
Download(s)
116
checked on Sep 5, 2022
Google ScholarTM
Check
Altmetric
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.