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http://hdl.handle.net/1942/28705| Title: | Nitrogen-doped diamond thin films: potential application in Fabry-Perot interferometer | Authors: | Kosowska, M. Majchrowicz, D. KAMATCHI JOTHIRAMALINGAM, Sankaran Ficek, M. Jedrzejewska-Szczerska, M. HAENEN, Ken |
Issue Date: | 2018 | Publisher: | SPIE-INT SOC OPTICAL ENGINEERING | Source: | Tuchin, Valery V.; Genina, Elina A.; Derbov, Vladimir L.; Postnov, Dmitry Engelevich (Ed.). PROCEEDINGS VOLUME 10716 SARATOV FALL MEETING 2017 | 26-30 SEPTEMBER 2017 Saratov Fall Meeting 2017: Optical Technologies in Biophysics and Medicine XIX, SPIE-INT SOC OPTICAL ENGINEERING, (Art N° 1071614) | Series/Report: | Proceedings of SPIE | Abstract: | In this paper we present results of preliminary research of using nitrogen-doped diamond (NDD) films as reflective layer in Fabry-Perot interferometer. NDD films were deposited on Si substrates by Microwave Plasma Enhanced Chemical Vapor Deposition (MPECVD) with the use of CH4, H-2 and N-2 gas mixtures. During deposition process the N-2 was kept constant at 6%, the CH4 was varied from 1 to 10% and supplemented by H-2. The total flow rate during NDD growth was maintained as 300 sccm. We performed series of measurements which showed that NDD can be used as a mirror in Fabry-Perot interferometer. The best signal visibility and repeatability of measurements were obtained for sample made with 3 sccm methane flow rate. | Notes: | [Kosowska, M.; Majchrowicz, D.; Ficek, M.; Jedrzejewska-Szczerska, M.] Gdansk Univ Technol, Fac Elect Telecommun & Informat, Dept Metrol & Optoelect, Gabriela Narutowicza St 11-12, PL-80233 Gdansk, Poland. [Sankaran, K. J.; Haenen, M. K.] Hasselt Univ, Inst Mat Res IMO, Wetenschapspk 1, B-3590 Diepenbeek, Belgium. [Sankaran, K. J.; Haenen, M. K.] IMEC VZW, IMOMEC, Wetenschapspk 1, B-3590 Diepenbeek, Belgium. | Keywords: | nitrogen-doped diamond; Fabry-Perot interferometer; diamond films; reflective layers | Document URI: | http://hdl.handle.net/1942/28705 | ISBN: | 9781510620025 | DOI: | 10.1117/12.2314445 | ISI #: | 000451711500040 | Category: | C1 | Type: | Proceedings Paper | Validations: | ecoom 2019 |
| Appears in Collections: | Research publications |
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