Please use this identifier to cite or link to this item:
http://hdl.handle.net/1942/28705
Title: | Nitrogen-doped diamond thin films: potential application in Fabry-Perot interferometer | Authors: | Kosowska, M. Majchrowicz, D. KAMATCHI JOTHIRAMALINGAM, Sankaran Ficek, M. Jedrzejewska-Szczerska, M. HAENEN, Ken |
Issue Date: | 2018 | Publisher: | SPIE-INT SOC OPTICAL ENGINEERING | Source: | Tuchin, Valery V.; Genina, Elina A.; Derbov, Vladimir L.; Postnov, Dmitry Engelevich (Ed.). PROCEEDINGS VOLUME 10716 SARATOV FALL MEETING 2017 | 26-30 SEPTEMBER 2017 Saratov Fall Meeting 2017: Optical Technologies in Biophysics and Medicine XIX, SPIE-INT SOC OPTICAL ENGINEERING, (Art N° 1071614) | Series/Report: | Proceedings of SPIE | Abstract: | In this paper we present results of preliminary research of using nitrogen-doped diamond (NDD) films as reflective layer in Fabry-Perot interferometer. NDD films were deposited on Si substrates by Microwave Plasma Enhanced Chemical Vapor Deposition (MPECVD) with the use of CH4, H-2 and N-2 gas mixtures. During deposition process the N-2 was kept constant at 6%, the CH4 was varied from 1 to 10% and supplemented by H-2. The total flow rate during NDD growth was maintained as 300 sccm. We performed series of measurements which showed that NDD can be used as a mirror in Fabry-Perot interferometer. The best signal visibility and repeatability of measurements were obtained for sample made with 3 sccm methane flow rate. | Notes: | [Kosowska, M.; Majchrowicz, D.; Ficek, M.; Jedrzejewska-Szczerska, M.] Gdansk Univ Technol, Fac Elect Telecommun & Informat, Dept Metrol & Optoelect, Gabriela Narutowicza St 11-12, PL-80233 Gdansk, Poland. [Sankaran, K. J.; Haenen, M. K.] Hasselt Univ, Inst Mat Res IMO, Wetenschapspk 1, B-3590 Diepenbeek, Belgium. [Sankaran, K. J.; Haenen, M. K.] IMEC VZW, IMOMEC, Wetenschapspk 1, B-3590 Diepenbeek, Belgium. | Keywords: | nitrogen-doped diamond; Fabry-Perot interferometer; diamond films; reflective layers | Document URI: | http://hdl.handle.net/1942/28705 | ISBN: | 9781510620025 | DOI: | 10.1117/12.2314445 | ISI #: | 000451711500040 | Category: | C1 | Type: | Proceedings Paper | Validations: | ecoom 2019 |
Appears in Collections: | Research publications |
Files in This Item:
File | Description | Size | Format | |
---|---|---|---|---|
SPIE_saratoov_azot-diament_end.pdf Restricted Access | Peer-reviewed author version | 728.05 kB | Adobe PDF | View/Open Request a copy |
Page view(s)
86
checked on Sep 7, 2022
Download(s)
82
checked on Sep 7, 2022
Google ScholarTM
Check
Altmetric
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.