Nitrogen-doped diamond thin films: potential application in Fabry-Perot interferometer

Abstract

In this paper we present results of preliminary research of using nitrogen-doped diamond (NDD) films as reflective layer in Fabry-Perot interferometer. NDD films were deposited on Si substrates by Microwave Plasma Enhanced Chemical Vapor Deposition (MPECVD) with the use of CH4, H-2 and N-2 gas mixtures. During deposition process the N-2 was kept constant at 6%, the CH4 was varied from 1 to 10% and supplemented by H-2. The total flow rate during NDD growth was maintained as 300 sccm. We performed series of measurements which showed that NDD can be used as a mirror in Fabry-Perot interferometer. The best signal visibility and repeatability of measurements were obtained for sample made with 3 sccm methane flow rate.