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Title: A method for determination of the effective diffusion coefficient and sputtering rate during plasma diffusion treatment
Authors: Dimitrov, VI
D'HAEN, Jan 
KNUYT, Gilbert 
STALS, Lambert 
Issue Date: 1998
Source: SURFACE & COATINGS TECHNOLOGY, 99(3). p. 234-241
Abstract: A method for determination of the effective diffusion coefficient and sputtering rate in plasma diffusion treatment of materials is presented. The method is based on a previously proposed plasma nitriding diffusion model, where the nitrided layer thickness as a Function of time is the main input data for determination of the nitrogen diffusion coefficient. The method is compared with the results of determination of diffusion coefficients in plasma nitrided austenitic stainless steels as received by the internal nitriding model, which is analogous to the internal oxidation model. it is demonstrated that the method predicts the correct temperature dependence of the nitrogen diffusion coefficient contrary to the internal nitriding model. The calculated sputtering rate is in good agreement with that estimated in the frame of Thornton's ion plating model. (C) 1998 Elsevier Science S.A.
Notes: Limburgs Univ Ctr, Inst Mat Res, Div Mat Phys, B-3590 Diepenbeek, Belgium.Dimitrov, VI, Univ Sofia, Fac Phys, Dept Solid State Phys, 5 James Bouchier Blvd, BG-1125 Sofia,
Keywords: austenitic steel nitriding; diffusion; plasma diffusion treatment
Document URI:
DOI: 10.1016/S0257-8972(97)00530-6
ISI #: 000072945400003
Type: Journal Contribution
Validations: ecoom 1999
Appears in Collections:Research publications

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