Please use this identifier to cite or link to this item: http://hdl.handle.net/1942/3235
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dc.contributor.authorVLEKKEN, Johan-
dc.contributor.authorWU, Ting-Di-
dc.contributor.authorD'OLIESLAEGER, Marc-
dc.contributor.authorKNUYT, Gilbert-
dc.contributor.authorVandervorst, W-
dc.contributor.authorDE SCHEPPER, Luc-
dc.date.accessioned2007-11-27T12:13:55Z-
dc.date.available2007-11-27T12:13:55Z-
dc.date.issued1998-
dc.identifier.citationJOURNAL OF THE AMERICAN SOCIETY FOR MASS SPECTROMETRY, 9(6). p. 638-642-
dc.identifier.issn1044-0305-
dc.identifier.urihttp://hdl.handle.net/1942/3235-
dc.description.abstractA new quantitation method, based on the detection of M-2(+) molecular ions, is presented. It has been shown that M-2(+) molecular ions are formed by a recombination process between independently sputtered M and M+ particles. Based on this formation mechanism, it will be demonstrated that M-2(+) molecular ions can be used to quantitate major elements. The method will be used for quantitation of an AlxGa1-xAs multilayer. Furthermore, it will be shown that some matrix effects can be explained by the energy dependence of instrument transmission. (C) 1998 American Society for Mass Spectrometry.-
dc.language.isoen-
dc.publisherELSEVIER SCIENCE INC-
dc.titleQuantitation of major elements with secondary ion mass spectrometry by using M-2(+)-molecular ions-
dc.typeJournal Contribution-
dc.identifier.epage642-
dc.identifier.issue6-
dc.identifier.spage638-
dc.identifier.volume9-
local.format.pages5-
dc.description.notesLimburgs Univ Ctr, Inst Mat Res, Div Mat Phys, B-3590 Diepenbeek, Belgium. IMEC VZW, Leuven, Belgium.Vlekken, J, Limburgs Univ Ctr, Inst Mat Res, Div Mat Phys, Univ Campus,Wetenschapspark 1, B-3590 Diepenbeek, Belgium.-
local.type.refereedRefereed-
local.type.specifiedArticle-
dc.bibliographicCitation.oldjcatA1-
dc.identifier.doi10.1016/S1044-0305(98)00028-2-
dc.identifier.isi000073734700010-
item.fulltextNo Fulltext-
item.contributorVLEKKEN, Johan-
item.contributorWU, Ting-Di-
item.contributorD'OLIESLAEGER, Marc-
item.contributorKNUYT, Gilbert-
item.contributorVandervorst, W-
item.contributorDE SCHEPPER, Luc-
item.fullcitationVLEKKEN, Johan; WU, Ting-Di; D'OLIESLAEGER, Marc; KNUYT, Gilbert; Vandervorst, W & DE SCHEPPER, Luc (1998) Quantitation of major elements with secondary ion mass spectrometry by using M-2(+)-molecular ions. In: JOURNAL OF THE AMERICAN SOCIETY FOR MASS SPECTROMETRY, 9(6). p. 638-642.-
item.accessRightsClosed Access-
item.validationecoom 1999-
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