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http://hdl.handle.net/1942/3254| Title: | Nucleation and orientation of sol-gel PZT-films on Pt electrodes | Authors: | Willems, GJ Wouters, DJ Maes, HE NOUWEN, Ria |
Issue Date: | 1997 | Publisher: | GORDON BREACH SCI PUBL LTD | Source: | INTEGRATED FERROELECTRICS, 15(1-4). p. 19-28 | Abstract: | The nucleation and preferential orientation of Lead Zirconate-Titanate (PZT) films deposited by sol-gel spin-coating on Pt bottom electrodes is discussed. The crucial role of the Ti adhesion layer is highlighted. A qualitative crystallization model is presented which can explain the nucleation behavior of PZT-films with different Zr/Ti-ratios on different electrode structures as well as the preferential orientation of the PZT-film. | Notes: | LIMBURGS UNIV CTR,B-3590 DIEPENBEEK,BELGIUM.Willems, GJ, IMEC,KAPELDREEF 75,B-3001 LOUVAIN,BELGIUM. | Document URI: | http://hdl.handle.net/1942/3254 | DOI: | 10.1080/10584589708015693 | ISI #: | A1997WR71500004 | Type: | Journal Contribution |
| Appears in Collections: | Research publications |
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