Nucleation and orientation of sol-gel PZT-films on Pt electrodes

Please use this identifier to cite or link to this item: http://hdl.handle.net/1942/3254

Title:	Nucleation and orientation of sol-gel PZT-films on Pt electrodes
Authors:	Willems, GJ Wouters, DJ Maes, HE NOUWEN, Ria
Issue Date:	1997
Publisher:	GORDON BREACH SCI PUBL LTD
Source:	INTEGRATED FERROELECTRICS, 15(1-4). p. 19-28
Abstract:	The nucleation and preferential orientation of Lead Zirconate-Titanate (PZT) films deposited by sol-gel spin-coating on Pt bottom electrodes is discussed. The crucial role of the Ti adhesion layer is highlighted. A qualitative crystallization model is presented which can explain the nucleation behavior of PZT-films with different Zr/Ti-ratios on different electrode structures as well as the preferential orientation of the PZT-film.
Notes:	LIMBURGS UNIV CTR,B-3590 DIEPENBEEK,BELGIUM.Willems, GJ, IMEC,KAPELDREEF 75,B-3001 LOUVAIN,BELGIUM.
Document URI:	http://hdl.handle.net/1942/3254
DOI:	10.1080/10584589708015693
ISI #:	A1997WR71500004
Type:	Journal Contribution
Appears in Collections:	Research publications

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