Transient nucleation of diamond: theoretical and experimental study

Abstract

Formation of diamond clusters (nucleation) on Si-substrates is studied both theoretically and experimentally. Measured number density of deposited diamond particles (with diameters 0.05 greater than or equal to mu m) corresponds to supercritical cluster sizes. Time delay of this process (which corresponds to the transient time of nucleation and growth of diamond nucleus to observable size) is determined by solving the Fokker-Planck-like equation as a function of the cluster size, temperature of the Si-wafer and of the supersaturation. It is shown that theoretically computed characteristics are in good agreement with our experimental data and also with the currently accepted picture of heterogeneous nucleation of diamond. (C) 1997 Elsevier Science S.A.