CVD diamond films for electronics

Abstract

Mechanical, optical, thermal and electronic properties of diamond films and chemical vapour deposition (CVD) techniques are briefly reviewed. Some spectroscopical methods for the characterization of CVD diamond films are described (optical absorption, photothermal deflection spectroscopy, Raman spectroscopy and electron paramagnetic resonance), together with our recent results on investigation of electronic properties of the main defects in this material, relevant to the application of CVD diamond films for the future electronic devices.