Energy-resolved mass spectra of ions and neutrals in triode ion plating of Ti(C,N) coatings

Abstract

Ti(C,N) coatings have been deposited by triode ion plating in a mixture of Ar, N-2 and C2H2. The energy spectra of selected ions and neutrals during deposition were measured by an energy-resolved mass spectrometer. The observed energy spectra of ions and neutrals are discussed. The energy spectra of neutral species were measured as the energy spectra of ions produced by crossed-beam electron ionization in the mass spectrometer. Both the energy spectra of Ti+ ions and Ti atoms show wide energy spectra, ranging to about 40 eV. Properties of the Ti(C,N) coatings are reported, especially the stress-free lattice parameter and the residual macroscopic stress measured by X-ray diffraction. It is observed that the compressive stress varies from -6 to -21 GPa with the different deposition conditions used. Effects of the total pressure, the substrate voltage and the current in the low voltage are on the energy spectra of ions and neutrals are discussed.