Please use this identifier to cite or link to this item: http://hdl.handle.net/1942/33898
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dc.contributor.authorHenderick, Lowie-
dc.contributor.authorHAMED, Hamid-
dc.contributor.authorMattelaer, Felix-
dc.contributor.authorMinjauw, Matthias-
dc.contributor.authorMeersschaut, Johan-
dc.contributor.authorDendooven, Jolien-
dc.contributor.authorSAFARI, Momo-
dc.contributor.authorVereecken, Philippe-
dc.contributor.authorDetavernier, Christophe-
dc.date.accessioned2021-04-12T15:33:58Z-
dc.date.available2021-04-12T15:33:58Z-
dc.date.issued2021-
dc.date.submitted2021-04-09T10:17:58Z-
dc.identifier.citationJournal of Power Sources, 497 (Art N° 229866)-
dc.identifier.issn0378-7753-
dc.identifier.urihttp://hdl.handle.net/1942/33898-
dc.description.abstractPE-ALD of nitrogen doped Ti-phosphate has been investigated in two dierent deposition processes. Both processes were analysed by in-situ ellipsometry (to monitor the growth of the lm) and X-ray photoelectron spectroscopy/elastic recoil detection (to study the composition). First, previous knowledge on rapid PE-ALD of undoped Ti-phosphate using an exposure sequence of trimethyl phosphate plasma-oxygen plasma-titanium isopropoxide, i.e. TMP*-O* 2-TTIP, was used to 1-
dc.description.sponsorshipThe authors are grateful for financial support to FWO-Vlaanderen, Belgium and the Special Research Fund BOF of Ghent University, Belgium (GOA project, Grant No. 01G01019, and SBO XL-Lion, S005017N). M. M. and J.D. acknowledge FWO-Vlaanderen for a post-doctoral fellowship.-
dc.language.isoen-
dc.publisherELSEVIER-
dc.rights2021 Elsevier B.V. All rights reserved.-
dc.subject.otherAtomic layer deposition-
dc.subject.otherPlasma-enhanced deposition-
dc.subject.otherNitrogen doping-
dc.subject.otherTitanium phosphate-
dc.subject.otherLithium-ion battery-
dc.subject.otherFunctional coating-
dc.titlePlasma enhanced atomic layer deposition of a (nitrogen doped) Ti phosphate coating for improved energy storage in Li-ion batteries-
dc.typeJournal Contribution-
dc.identifier.volume497-
local.format.pages11-
local.bibliographicCitation.jcatA1-
local.publisher.placeRADARWEG 29, 1043 NX AMSTERDAM, NETHERLANDS-
local.type.refereedRefereed-
local.type.specifiedArticle-
local.bibliographicCitation.artnr229866-
dc.identifier.doi10.1016/j.jpowsour.2021.229866-
dc.identifier.isiWOS:000647598400007-
dc.identifier.eissn1873-2755-
local.provider.typePdf-
local.uhasselt.uhpubyes-
local.uhasselt.internationalno-
item.contributorHenderick, Lowie-
item.contributorHAMED, Hamid-
item.contributorMattelaer, Felix-
item.contributorMinjauw, Matthias-
item.contributorMeersschaut, Johan-
item.contributorDendooven, Jolien-
item.contributorSAFARI, Momo-
item.contributorVereecken, Philippe-
item.contributorDetavernier, Christophe-
item.fullcitationHenderick, Lowie; HAMED, Hamid; Mattelaer, Felix; Minjauw, Matthias; Meersschaut, Johan; Dendooven, Jolien; SAFARI, Momo; Vereecken, Philippe & Detavernier, Christophe (2021) Plasma enhanced atomic layer deposition of a (nitrogen doped) Ti phosphate coating for improved energy storage in Li-ion batteries. In: Journal of Power Sources, 497 (Art N° 229866).-
item.fulltextWith Fulltext-
item.validationecoom 2022-
item.accessRightsOpen Access-
crisitem.journal.issn0378-7753-
crisitem.journal.eissn1873-2755-
Appears in Collections:Research publications
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