Please use this identifier to cite or link to this item: http://hdl.handle.net/1942/3462
Title: Optical emission spectroscopy of the plasma during CVD diamond growth with nitrogen addition
Authors: Vandevelde, Thierry
NESLADEK, Milos 
QUAEYHAEGENS, Carl 
STALS, Lambert 
Issue Date: 1996
Publisher: ELSEVIER SCIENCE SA LAUSANNE
Source: THIN SOLID FILMS, 290-291. p. 143-147
Abstract: Careful control of the process parameters during CVD diamond synthesis allows growth of diamond films with different morphologies and preferred orientations, It has been lately shown that the addition of small concentrations of nitrogen to the process gas mixture can change the morphology of the deposit by favouring the growth of the diamond film in the [100] direction, On the other hand, higher nitrogen concentrations lead to the deterioration of the diamond him quality. The aim of this work is to correlate nitrogen concentrations in the process gas mixture to the emission intensities of nitrogen containing radicals (N-2 C-3 Pi(u)-B-3 Pi(g) system and CN B-2 Sigma-X(2) Sigma violet system) and carbon containing radicals (CH A(2) Delta-X(2) Pi system and C-2 Swan system). Scanning Electron Microscopy (SEM) is used to study the influence of nitrogen on the diamond him morphology.
Notes: Vandevelde, T, LIMBURGS UNIV CTR,INST MAT RES,UNIV CAMPUS,WETENSCHAPSPK,B-3590 DIEPENBEEK,BELGIUM.
Keywords: diamond; microwave CVD; OES; SEM
Document URI: http://hdl.handle.net/1942/3462
ISSN: 0040-6090
e-ISSN: 1879-2731
DOI: 10.1016/S0040-6090(96)09189-4
ISI #: A1996WB81900029
Type: Journal Contribution
Appears in Collections:Research publications

Show full item record

SCOPUSTM   
Citations

49
checked on Sep 2, 2020

WEB OF SCIENCETM
Citations

44
checked on May 22, 2022

Page view(s)

42
checked on May 25, 2022

Google ScholarTM

Check

Altmetric


Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.