Monte Carlo simulation of the formation of MCs(+) molecular ions

Abstract

During recent years, the use of the MCs(+) ion technique for the quantification of major elements or at interface regions has gained a lot of interest. It has been shown that this technique is very successful in the field of III-V semiconductor applications. Unfortunately, for many other applications the technique is hampered by some not well understood problems. In this paper we will try to gain a deeper insight into the formation mechanism of the molecular MCs(+) ions. A Monte Carlo model to simulate the cluster formation and to calculate the energy spectra of the MCs(+) ions will be presented. The model is evaluated by comparing the calculated energy spectra with experimental data. It will be shown that a very good agreement is obtained.