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http://hdl.handle.net/1942/3748
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DC Field | Value | Language |
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dc.contributor.author | POULEK, V | - |
dc.contributor.author | QUAEYHAEGENS, Carl | - |
dc.contributor.author | KNUYT, Gilbert | - |
dc.contributor.author | STALS, Lambert | - |
dc.contributor.author | FAGARD, Veronique | - |
dc.date.accessioned | 2007-11-29T13:06:03Z | - |
dc.date.available | 2007-11-29T13:06:03Z | - |
dc.date.issued | 1993 | - |
dc.identifier.citation | SURFACE & COATINGS TECHNOLOGY, 60(1-3). p. 480-483 | - |
dc.identifier.issn | 0257-8972 | - |
dc.identifier.uri | http://hdl.handle.net/1942/3748 | - |
dc.description.abstract | This paper deals with the influence of the nitrogen flow rate on the microstructure of delta-TiN(x) films prepared by d.c, magnetron sputtering. The delta-TiN(x) films were prepared under decreasing nitrogen flow rates to obtain nitrogen contents in the films ranging from x = 0.99 to 0.95. Ion bombardment of the films was negligible in these experiments. Some films prepared under deposition conditions which typically result in a fine-grain (about 0.1 mum) transition zone microstructure exhibit a ''large''-grain (about 1 mum) zone III microstructure. It has been demonstrated that there exists a narrow area of nitrogen flow rate for which the microstructure of the films does not agree with the zone model. The large-grain films are stress free. The nitrogen content in the films containing large grains is x = 0.97. All deposition conditions except the nitrogen flow rate were kept constant in this experiment. Chemical energy dissipated during the reactive process can explain the observed effects. | - |
dc.language.iso | en | - |
dc.publisher | ELSEVIER SCIENCE SA LAUSANNE | - |
dc.title | EXCEPTIONS TO THE MICROSTRUCTURE ZONE MODEL REVEALED BY THE REACTIVE DC MAGNETRON SPUTTER-DEPOSITION OF DELTA-TINX THIN-FILMS | - |
dc.type | Journal Contribution | - |
dc.identifier.epage | 483 | - |
dc.identifier.issue | 1-3 | - |
dc.identifier.spage | 480 | - |
dc.identifier.volume | 60 | - |
local.format.pages | 4 | - |
dc.description.notes | POULEK, V, LIMBURGS UNIV CTR,INST MAT RES,DIV MAT PHYS,SCI PK,UNIV CAMPUS,B-3590 DIEPENBEEK,BELGIUM. | - |
local.type.refereed | Refereed | - |
local.type.specified | Article | - |
dc.bibliographicCitation.oldjcat | A1 | - |
dc.identifier.isi | A1993MD49900020 | - |
item.contributor | POULEK, V | - |
item.contributor | QUAEYHAEGENS, Carl | - |
item.contributor | KNUYT, Gilbert | - |
item.contributor | STALS, Lambert | - |
item.contributor | FAGARD, Veronique | - |
item.accessRights | Closed Access | - |
item.fullcitation | POULEK, V; QUAEYHAEGENS, Carl; KNUYT, Gilbert; STALS, Lambert & FAGARD, Veronique (1993) EXCEPTIONS TO THE MICROSTRUCTURE ZONE MODEL REVEALED BY THE REACTIVE DC MAGNETRON SPUTTER-DEPOSITION OF DELTA-TINX THIN-FILMS. In: SURFACE & COATINGS TECHNOLOGY, 60(1-3). p. 480-483. | - |
item.fulltext | No Fulltext | - |
Appears in Collections: | Research publications |
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